发明授权
- 专利标题: High mobility transistors in SOI and method for forming
- 专利标题(中): SOI中的高迁移率晶体管和形成方法
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申请号: US09683656申请日: 2002-01-30
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公开(公告)号: US06624478B2公开(公告)日: 2003-09-23
- 发明人: Brent A. Anderson , Xavier Baie , Randy W. Mann , Edward J. Nowak , Jed H. Rankin
- 申请人: Brent A. Anderson , Xavier Baie , Randy W. Mann , Edward J. Nowak , Jed H. Rankin
- 主分类号: H01L2701
- IPC分类号: H01L2701
摘要:
The present invention provides a device design and method for forming Field Effect Transistors (FETs) that have improved performance without negative impacts to device density. The present invention forms high-gain p-channel transistors by forming them on silicon islands where hole mobility has been increased. The hole mobility is increased by applying physical straining to the silicon islands. By straining the silicon islands, the hole mobility is increased resulting in increased device gain. This is accomplished without requiring an increase in the size of the devices, or the size of the contacts to the devices.
公开/授权文献
- US20030141548A1 HIGH MOBILITY TRANSISTORS IN SOI AND METHOD FOR FORMING 公开/授权日:2003-07-31
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