Invention Grant
US06656368B2 Nonstick layer for a micromechanical component 有权
用于微机械部件的不粘层

Nonstick layer for a micromechanical component
Abstract:
A method for manufacturing micromechanical components, and a micromechanical component, in which a movable element is produced on a sacrificial layer. In a subsequent step the sacrificial layer beneath the movable element is removed so that the movable element becomes movable. After removal of the sacrificial layer, a protective layer is deposited on a surface of the movable element. Silicon oxide and/or silicon nitride is used for the protective layer.
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