Invention Grant
- Patent Title: Rotational speed sensor
- Patent Title (中): 转速传感器
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Application No.: US10258218Application Date: 2003-05-29
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Publication No.: US06691571B2Publication Date: 2004-02-17
- Inventor: Rainer Willig , Andreas Thomae , Burkhard Kuhlmann , Joerg Hauer , Udo-Martin Gomez , Siegbert Goetz , Christian Doering , Michael Fehrenbach , Wolfram Bauer , Udo Bischof , Reinhard Neul , Karsten Funk , Markus Lutz , Gerhard Wucher , Jochen Franz
- Applicant: Rainer Willig , Andreas Thomae , Burkhard Kuhlmann , Joerg Hauer , Udo-Martin Gomez , Siegbert Goetz , Christian Doering , Michael Fehrenbach , Wolfram Bauer , Udo Bischof , Reinhard Neul , Karsten Funk , Markus Lutz , Gerhard Wucher , Jochen Franz
- Priority: DE10108198 20010221
- Main IPC: G01C1900
- IPC: G01C1900
Abstract:
An rate-of-rotation sensor having a Coriolis element, which is arranged over a surface of a substrate, is described. The Coriolis element is induced to oscillate in parallel to a first axis. In response to a Coriolis force, the Coriolis element is deflected in a second axis, which is perpendicular to the first axis. A proof element is provided to prove the deflection.
Public/Granted literature
- US20030183007A1 Rotational speed sensor Public/Granted day:2003-10-02
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