Micromechanical rotational rate sensor
    2.
    发明申请
    Micromechanical rotational rate sensor 有权
    微机电转速传感器

    公开(公告)号:US20060107738A1

    公开(公告)日:2006-05-25

    申请号:US11328755

    申请日:2006-01-09

    IPC分类号: G01P15/08

    CPC分类号: G01C19/5747

    摘要: An exemplary embodiment of the present invention creates a micromechanical rotational rate sensor having a first Coriolis mass element and a second Coriolis mass element which may be situated over a surface of a substrate. An exemplary embodiment of a micromechanical rotational rate sensor may have an activating device by which the first Coriolis mass element and the second Coriolis mass element are able to have vibrations activated along a first axis. An exemplary embodiment of a micromechanical rotational rate sensor may have a detection device by which deflections of the first Coriolis mass elements and of the second Coriolis element are able to be detected along a second axis, which is perpendicular to the first axis, on the basis of a correspondingly acting Coriolis force. The first axis and second axis may run parallel to the surface of the substrate. The detecting device may have a first detection mass device and a second detection mass device. The centers of gravity of the first Coriolis mass element, the second Coriolis mass element, the first detection mass device and the second detection mass device may coincide at a common mass center of gravity when they are at rest.

    摘要翻译: 本发明的示例性实施例创建了具有第一科里奥利质量元件和可位于衬底表面上的第二科里奥利质量元件的微机械转速传感器。 微机电转速传感器的示例性实施例可以具有激活装置,第一科里奥利质量元件和第二科里奥利质量元件可以通过该激活装置具有沿第一轴线激活的振动。 微机电转速传感器的示例性实施例可以具有检测装置,通过该检测装置,第一科里奥利质量元件和第二科里奥利元件的偏转能够沿着垂直于第一轴线的第二轴线被检测 的相应的科里奥利力量。 第一轴线和第二轴线可以平行于基板的表面延伸。 检测装置可以具有第一检测质量装置和第二检测质量装置。 当第一科里奥利质量元件,第二科里奥利质量元件,第一检测质量装置和第二检测质量装置的重心在静止时可以在共同的重心处重合。

    Oscillating Circuit
    5.
    发明申请
    Oscillating Circuit 有权
    振荡电路

    公开(公告)号:US20080297264A1

    公开(公告)日:2008-12-04

    申请号:US11794780

    申请日:2005-12-09

    IPC分类号: H03B5/30

    CPC分类号: G01C19/56

    摘要: An oscillating circuit includes an analog oscillation element. The oscillating circuit includes at least one analog-to-digital conversion device. A method is for operating an oscillating circuit, in which a mechanical oscillator oscillates at a natural frequency. The oscillation amplitude is measured and digitized. A digital control signal is generated from this with the aid of a digital amplitude controller. A driving signal is generated, in turn, from the digital control signal, the driving signal driving the mechanical oscillator with the aid of a drive unit. This control loop stabilizes the oscillation amplitude.

    摘要翻译: 振荡电路包括模拟振荡元件。 振荡电路包括至少一个模拟 - 数字转换装置。 一种用于操作振荡电路的方法,其中机械振荡器以固有频率振荡。 振荡幅度被测量和数字化。 借助于数字幅度控制器从其产生数字控制信号。 驱动信号依次由数字控制信号产生,驱动信号借助于驱动单元驱动机械振荡器。 该控制回路稳定振荡幅度。

    Sensor having integrated actuation and detection means
    7.
    发明申请
    Sensor having integrated actuation and detection means 审中-公开
    具有集成驱动和检测装置的传感器

    公开(公告)号:US20050210978A1

    公开(公告)日:2005-09-29

    申请号:US11042454

    申请日:2005-01-25

    IPC分类号: B81B3/00 G01C19/56 G01P3/44

    CPC分类号: G01C19/5712

    摘要: A sensor having at least one actuation/detection device, one actuation unit, and one analyzing unit. In a first operating state, the actuation/detection device is connected to the actuation unit and, in a second operating state, the actuation/detection device is connected to the analyzing unit.

    摘要翻译: 具有至少一个致动/检测装置,一个致动单元和一个分析单元的传感器。 在第一操作状态下,致动/检测装置连接到致动单元,并且在第二操作状态下,致动/检测装置连接到分析单元。