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公开(公告)号:US07839227B2
公开(公告)日:2010-11-23
申请号:US11794780
申请日:2005-12-09
申请人: Hans-Dieter Schwarz , Arnd Gangei , Wolfram Bauer , Gerhard Wucher , Christoph Lang , Ermin Esch , Michael Veith , Thomas Mayer , Markus Brockmann
发明人: Hans-Dieter Schwarz , Arnd Gangei , Wolfram Bauer , Gerhard Wucher , Christoph Lang , Ermin Esch , Michael Veith , Thomas Mayer , Markus Brockmann
IPC分类号: H03B5/30
CPC分类号: G01C19/56
摘要: An oscillating circuit includes an analog oscillation element. The oscillating circuit includes at least one analog-to-digital conversion device. A method is for operating an oscillating circuit, in which a mechanical oscillator oscillates at a natural frequency. The oscillation amplitude is measured and digitized. A digital control signal is generated from this with the aid of a digital amplitude controller. A driving signal is generated, in turn, from the digital control signal, the driving signal driving the mechanical oscillator with the aid of a drive unit. This control loop stabilizes the oscillation amplitude.
摘要翻译: 振荡电路包括模拟振荡元件。 振荡电路包括至少一个模拟 - 数字转换装置。 一种用于操作振荡电路的方法,其中机械振荡器以固有频率振荡。 振荡幅度被测量和数字化。 借助于数字幅度控制器从其产生数字控制信号。 驱动信号依次由数字控制信号产生,驱动信号借助于驱动单元驱动机械振荡器。 该控制回路稳定振荡幅度。
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公开(公告)号:US20060107738A1
公开(公告)日:2006-05-25
申请号:US11328755
申请日:2006-01-09
申请人: Rainer Willig , Andreas Thomae , Burkhard Kuhlmann , Joerg Hauer , Udo-Martin Gomez , Siegbert Goetz , Christian Doering , Michael Fehrenbach , Wolfram Bauer , Udo Bischof , Reinhard Neul , Karsten Funk , Markus Lutz , Gerhard Wucher , Jochen Franz
发明人: Rainer Willig , Andreas Thomae , Burkhard Kuhlmann , Joerg Hauer , Udo-Martin Gomez , Siegbert Goetz , Christian Doering , Michael Fehrenbach , Wolfram Bauer , Udo Bischof , Reinhard Neul , Karsten Funk , Markus Lutz , Gerhard Wucher , Jochen Franz
IPC分类号: G01P15/08
CPC分类号: G01C19/5747
摘要: An exemplary embodiment of the present invention creates a micromechanical rotational rate sensor having a first Coriolis mass element and a second Coriolis mass element which may be situated over a surface of a substrate. An exemplary embodiment of a micromechanical rotational rate sensor may have an activating device by which the first Coriolis mass element and the second Coriolis mass element are able to have vibrations activated along a first axis. An exemplary embodiment of a micromechanical rotational rate sensor may have a detection device by which deflections of the first Coriolis mass elements and of the second Coriolis element are able to be detected along a second axis, which is perpendicular to the first axis, on the basis of a correspondingly acting Coriolis force. The first axis and second axis may run parallel to the surface of the substrate. The detecting device may have a first detection mass device and a second detection mass device. The centers of gravity of the first Coriolis mass element, the second Coriolis mass element, the first detection mass device and the second detection mass device may coincide at a common mass center of gravity when they are at rest.
摘要翻译: 本发明的示例性实施例创建了具有第一科里奥利质量元件和可位于衬底表面上的第二科里奥利质量元件的微机械转速传感器。 微机电转速传感器的示例性实施例可以具有激活装置,第一科里奥利质量元件和第二科里奥利质量元件可以通过该激活装置具有沿第一轴线激活的振动。 微机电转速传感器的示例性实施例可以具有检测装置,通过该检测装置,第一科里奥利质量元件和第二科里奥利元件的偏转能够沿着垂直于第一轴线的第二轴线被检测 的相应的科里奥利力量。 第一轴线和第二轴线可以平行于基板的表面延伸。 检测装置可以具有第一检测质量装置和第二检测质量装置。 当第一科里奥利质量元件,第二科里奥利质量元件,第一检测质量装置和第二检测质量装置的重心在静止时可以在共同的重心处重合。
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公开(公告)号:US20070236373A1
公开(公告)日:2007-10-11
申请号:US11629826
申请日:2005-05-31
申请人: Wolfgang Hellwig , Martin Wrede , Gerhard Wucher , Dirk Droste , Thomas Walker
发明人: Wolfgang Hellwig , Martin Wrede , Gerhard Wucher , Dirk Droste , Thomas Walker
CPC分类号: G01D5/24 , G01P15/125 , H03M3/39 , H03M3/43 , H03M3/456
摘要: A circuit for converting the capacitive signal change of a differential capacitor into digital signals, the circuit including a sigma delta modulator. The differential capacitor is a component of the signal feed structure and the reference feedback structure of the sigma delta modulator.
摘要翻译: 用于将差分电容器的电容信号变化转换为数字信号的电路,该电路包括Σ-Δ调制器。 差分电容器是信号馈送结构的组成部分和Σ-Δ调制器的参考反馈结构。
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公开(公告)号:US06691571B2
公开(公告)日:2004-02-17
申请号:US10258218
申请日:2003-05-29
申请人: Rainer Willig , Andreas Thomae , Burkhard Kuhlmann , Joerg Hauer , Udo-Martin Gomez , Siegbert Goetz , Christian Doering , Michael Fehrenbach , Wolfram Bauer , Udo Bischof , Reinhard Neul , Karsten Funk , Markus Lutz , Gerhard Wucher , Jochen Franz
发明人: Rainer Willig , Andreas Thomae , Burkhard Kuhlmann , Joerg Hauer , Udo-Martin Gomez , Siegbert Goetz , Christian Doering , Michael Fehrenbach , Wolfram Bauer , Udo Bischof , Reinhard Neul , Karsten Funk , Markus Lutz , Gerhard Wucher , Jochen Franz
IPC分类号: G01C1900
CPC分类号: G01C19/5747
摘要: An rate-of-rotation sensor having a Coriolis element, which is arranged over a surface of a substrate, is described. The Coriolis element is induced to oscillate in parallel to a first axis. In response to a Coriolis force, the Coriolis element is deflected in a second axis, which is perpendicular to the first axis. A proof element is provided to prove the deflection.
摘要翻译: 描述了布置在基板的表面上的具有科里奥利元件的旋转速率传感器。 诱导科里奥利元件平行于第一轴振荡。 响应于科里奥利力,科里奥利元件在垂直于第一轴线的第二轴线上偏转。 提供证明元件以证明偏转。
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公开(公告)号:US20080297264A1
公开(公告)日:2008-12-04
申请号:US11794780
申请日:2005-12-09
申请人: Hans-Dieter Schwarz , Arnd Gangei , Wolfram Bauer , Gerhard Wucher , Christoph Lang , Ermin Esch , Michael Veith , Thomas Mayer , Markus Brockmann
发明人: Hans-Dieter Schwarz , Arnd Gangei , Wolfram Bauer , Gerhard Wucher , Christoph Lang , Ermin Esch , Michael Veith , Thomas Mayer , Markus Brockmann
IPC分类号: H03B5/30
CPC分类号: G01C19/56
摘要: An oscillating circuit includes an analog oscillation element. The oscillating circuit includes at least one analog-to-digital conversion device. A method is for operating an oscillating circuit, in which a mechanical oscillator oscillates at a natural frequency. The oscillation amplitude is measured and digitized. A digital control signal is generated from this with the aid of a digital amplitude controller. A driving signal is generated, in turn, from the digital control signal, the driving signal driving the mechanical oscillator with the aid of a drive unit. This control loop stabilizes the oscillation amplitude.
摘要翻译: 振荡电路包括模拟振荡元件。 振荡电路包括至少一个模拟 - 数字转换装置。 一种用于操作振荡电路的方法,其中机械振荡器以固有频率振荡。 振荡幅度被测量和数字化。 借助于数字幅度控制器从其产生数字控制信号。 驱动信号依次由数字控制信号产生,驱动信号借助于驱动单元驱动机械振荡器。 该控制回路稳定振荡幅度。
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公开(公告)号:US07423568B2
公开(公告)日:2008-09-09
申请号:US11629826
申请日:2005-05-31
申请人: Wolfgang Hellwig , Martin Wrede , Gerhard Wucher , Dirk Droste , Thomas Walker
发明人: Wolfgang Hellwig , Martin Wrede , Gerhard Wucher , Dirk Droste , Thomas Walker
IPC分类号: H03M3/00
CPC分类号: G01D5/24 , G01P15/125 , H03M3/39 , H03M3/43 , H03M3/456
摘要: A circuit for converting the capacitive signal change of a differential capacitor into digital signals, the circuit including a sigma delta modulator. The differential capacitor is a component of the signal feed structure and the reference feedback structure of the sigma delta modulator.
摘要翻译: 用于将差分电容器的电容信号变化转换为数字信号的电路,该电路包括Σ-Δ调制器。 差分电容器是信号馈送结构的组成部分和Σ-Δ调制器的参考反馈结构。
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公开(公告)号:US20050210978A1
公开(公告)日:2005-09-29
申请号:US11042454
申请日:2005-01-25
申请人: Markus Lang , Arnd Gangei , Gerhard Wucher
发明人: Markus Lang , Arnd Gangei , Gerhard Wucher
CPC分类号: G01C19/5712
摘要: A sensor having at least one actuation/detection device, one actuation unit, and one analyzing unit. In a first operating state, the actuation/detection device is connected to the actuation unit and, in a second operating state, the actuation/detection device is connected to the analyzing unit.
摘要翻译: 具有至少一个致动/检测装置,一个致动单元和一个分析单元的传感器。 在第一操作状态下,致动/检测装置连接到致动单元,并且在第二操作状态下,致动/检测装置连接到分析单元。
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公开(公告)号:US06705164B2
公开(公告)日:2004-03-16
申请号:US10258336
申请日:2003-03-19
申请人: Rainer Willig , Andreas Thomae , Burkhard Kuhlmann , Joerg Hauer , Udo-Martin Gomez , Siegbert Goetz , Christian Doering , Michael Fehrenbach , Wolfram Bauer , Udo Bischof , Reinhard Neul , Karsten Funk , Markus Lutz , Gerhard Wucher , Jochen Franz
发明人: Rainer Willig , Andreas Thomae , Burkhard Kuhlmann , Joerg Hauer , Udo-Martin Gomez , Siegbert Goetz , Christian Doering , Michael Fehrenbach , Wolfram Bauer , Udo Bischof , Reinhard Neul , Karsten Funk , Markus Lutz , Gerhard Wucher , Jochen Franz
IPC分类号: G01C1900
CPC分类号: G01C19/5747
摘要: A yaw-rate sensor including a first and a second Coriolis element that are arranged side-by-side above a surface of a substrate. The Coriolis elements are induced to oscillate parallel to a first axis Y. Due to a Coriolis force, the Coriolis elements are deflected in a second axis X which is perpendicular to the first axis Y. The oscillations of the first and second Coriolis elements occur in phase opposition to each other on paths which, without the effect of a Coriolis force, are two straight lines parallel to each other.
摘要翻译: 一种偏转速率传感器,包括在衬底表面上并排布置的第一和第二科里奥利元件。 诱导科里奥利元件平行于第一轴线Y振荡。由于科里奥利力,科里奥利元件在垂直于第一轴线Y的第二轴线X中偏转。第一和第二科里奥利元件的振荡发生在 在没有科里奥利力的作用下彼此平行的两条直线的路径上相互相反。
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公开(公告)号:US07134337B2
公开(公告)日:2006-11-14
申请号:US11328755
申请日:2006-01-09
申请人: Rainer Willig , Andreas Thomae , Burkhard Kuhlmann , Joerg Hauer , Udo-Martin Gomez , Siegbert Goetz , Christian Doering , Michael Fehrenbach , Wolfram Bauer , Udo Bischof , Reinhard Neul , Karsten Funk , Markus Lutz , Gerhard Wucher , Jochen Franz
发明人: Rainer Willig , Andreas Thomae , Burkhard Kuhlmann , Joerg Hauer , Udo-Martin Gomez , Siegbert Goetz , Christian Doering , Michael Fehrenbach , Wolfram Bauer , Udo Bischof , Reinhard Neul , Karsten Funk , Markus Lutz , Gerhard Wucher , Jochen Franz
IPC分类号: G01P9/04
CPC分类号: G01C19/5747
摘要: An exemplary embodiment of the present invention creates a micromechanical rotational rate sensor having a first Coriolis mass element and a second Coriolis mass element which may be situated over a surface of a substrate. An exemplary embodiment of a micromechanical rotational rate sensor may have an activating device by which the first Coriolis mass element and the second Coriolis mass element are able to have vibrations activated along a first axis. An exemplary embodiment of a micromechanical rotational rate sensor may have a detection device by which deflections of the first Coriolis mass elements and of the second Coriolis element are able to be detected along a second axis, which is perpendicular to the first axis, on the basis of a correspondingly acting Coriolis force. The first axis and second axis may run parallel to the surface of the substrate. The detecting device may have a first detection mass device and a second detection mass device. The centers of gravity of the first Coriolis mass element, the second Coriolis mass element, the first detection mass device and the second detection mass device may coincide at a common mass center of gravity when they are at rest.
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公开(公告)号:US06752017B2
公开(公告)日:2004-06-22
申请号:US10258339
申请日:2003-03-19
申请人: Rainer Willig , Andreas Thomae , Burkhard Kuhlmann , Joerg Hauer , Udo Martin Gomez , Siegbert Goetz , Christian Doering , Michael Fehrenbach , Wolfram Bauer , Udo Bischof , Reinhard Neul , Karsten Funk , Markus Lutz , Gerhard Wucher , Jochen Franz
发明人: Rainer Willig , Andreas Thomae , Burkhard Kuhlmann , Joerg Hauer , Udo Martin Gomez , Siegbert Goetz , Christian Doering , Michael Fehrenbach , Wolfram Bauer , Udo Bischof , Reinhard Neul , Karsten Funk , Markus Lutz , Gerhard Wucher , Jochen Franz
IPC分类号: G01P1514
CPC分类号: G01C19/5747
摘要: A yaw-rate sensor is proposed having a first and a second Coriolis element (100, 200) which are arranged side-by-side above a surface (1) of a substrate. The Coriolis elements (100, 200) are induced to oscillate parallel to a first axis. Due to a Coriolis force, the Coriolis elements (100, 200) are deflected in a second axis which is perpendicular to the first axis. The first and second Coriolis elements (100, 200) are coupled by a spring (52) which is designed to be yielding in the first and in the second axis. Thus, the frequencies of the oscillations in the two axes are developed differently for the in-phase and antiphase oscillation.
摘要翻译: 一种偏转速率传感器,包括在衬底表面上并排布置的第一和第二科里奥利元件。 诱导科里奥利元件平行于第一轴振荡。 由于科里奥利力,科里奥利元件在垂直于第一轴线的第二轴线上偏转。 第一和第二科里奥利元件通过被配置为在第一轴线和第二轴线中屈服的弹簧联接。 因此,对于同相和反相振荡,两轴的振荡频率不同。
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