发明授权
US06732911B2 Solder jointing system, solder jointing method, semiconductor device manufacturing method, and semiconductor device manufacturing system 有权
焊接接头系统,焊接方法,半导体器件制造方法以及半导体器件制造系统

Solder jointing system, solder jointing method, semiconductor device manufacturing method, and semiconductor device manufacturing system
摘要:
There is provided a chamber open to the outside through openings through which a solder-adhered object is passed and the chamber having a heating/melting area, a carrying mechanism for carrying the solder-adhered object into the heating/melting area, a formic-acid supplying means for supplying a formic acid into the heating/melting area, an exhausting means for exhausting a gas from the heating/melting area and its neighboring area to create a lower pressure area in the heating/melting area as compared to the pressure of outside the chamber, heating means for heating directly or indirectly the solder-adhered object in the heating/melting area, and an air-stream suppressing means for disturbing a gas flow between the heating/melting area and the carrying areas. Accordingly, there can be provided a solder jointing system for jointing solder layers of a semiconductor device, an electronic device, or the like to the wirings or the pads, which is capable of having a high processing ability and preventing re-oxidation.
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