发明授权
- 专利标题: Solder jointing system, solder jointing method, semiconductor device manufacturing method, and semiconductor device manufacturing system
- 专利标题(中): 焊接接头系统,焊接方法,半导体器件制造方法以及半导体器件制造系统
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申请号: US09970802申请日: 2001-10-05
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公开(公告)号: US06732911B2公开(公告)日: 2004-05-11
- 发明人: Hirohisa Matsuki , Hiroyuki Matsui , Eiji Yoshida , Takao Ohno , Koki Otake , Akiyo Mizutani , Motoshu Miyajima , Masataka Mizukoshi , Eiji Watanabe
- 申请人: Hirohisa Matsuki , Hiroyuki Matsui , Eiji Yoshida , Takao Ohno , Koki Otake , Akiyo Mizutani , Motoshu Miyajima , Masataka Mizukoshi , Eiji Watanabe
- 优先权: JP2001-010423 20010118; JP2001-067615 20010309; JP2001-172960 20010607
- 主分类号: B23K3538
- IPC分类号: B23K3538
摘要:
There is provided a chamber open to the outside through openings through which a solder-adhered object is passed and the chamber having a heating/melting area, a carrying mechanism for carrying the solder-adhered object into the heating/melting area, a formic-acid supplying means for supplying a formic acid into the heating/melting area, an exhausting means for exhausting a gas from the heating/melting area and its neighboring area to create a lower pressure area in the heating/melting area as compared to the pressure of outside the chamber, heating means for heating directly or indirectly the solder-adhered object in the heating/melting area, and an air-stream suppressing means for disturbing a gas flow between the heating/melting area and the carrying areas. Accordingly, there can be provided a solder jointing system for jointing solder layers of a semiconductor device, an electronic device, or the like to the wirings or the pads, which is capable of having a high processing ability and preventing re-oxidation.
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