Invention Grant
US06853142B2 Methods and apparatus for generating high-density plasma 有权
用于产生高密度等离子体的方法和装置

Methods and apparatus for generating high-density plasma
Abstract:
Methods and apparatus for generating a strongly-ionized plasma are described. An apparatus for generating a strongly-ionized plasma according to the present invention includes an anode and a cathode that is positioned adjacent to the anode to form a gap there between. An ionization source generates a weakly-ionized plasma proximate to the cathode. A power supply produces an electric field in the gap between the anode and the cathode. The electric field generates excited atoms in the weakly-ionized plasma and generates secondary electrons from the cathode. The secondary electrons ionize the excited atoms, thereby creating the strongly-ionized plasma
Public/Granted literature
Information query
Patent Agency Ranking
0/0