发明授权
- 专利标题: Photolithographically-patterned out-of-plane coil structures and method of making
- 专利标题(中): 光刻图案的平面外线圈结构和制造方法
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申请号: US09573815申请日: 2000-05-17
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公开(公告)号: US06856225B1公开(公告)日: 2005-02-15
- 发明人: Christopher L. Chua , Francesco Lemmi , Koenraad F. Van Schuylenbergh , Jeng Ping Lu , David K. Fork , Eric Peeters , Decai Sun , Donald L. Smith , Linda T. Romano
- 申请人: Christopher L. Chua , Francesco Lemmi , Koenraad F. Van Schuylenbergh , Jeng Ping Lu , David K. Fork , Eric Peeters , Decai Sun , Donald L. Smith , Linda T. Romano
- 申请人地址: US CT Stamford
- 专利权人: Xerox Corporation
- 当前专利权人: Xerox Corporation
- 当前专利权人地址: US CT Stamford
- 代理商 Jeannette M. Walder
- 主分类号: H01F41/04
- IPC分类号: H01F41/04 ; G01R1/067 ; G01R3/00 ; G03C5/00 ; H01F17/00 ; H01F17/02 ; H01F27/29 ; H01L21/02 ; H01L21/60 ; H01L21/768 ; H01L23/485 ; H01L23/49 ; H01L23/498 ; H01L23/522 ; H01R9/03 ; H05K7/02
摘要:
An out-of-plane micro-structure which can be used for on-chip integration of high-Q inductors and transformers places the magnetic field direction parallel to the substrate plane without requiring high aspect ratio processing. The photolithographically patterned coil structure includes an elastic member having an intrinsic stress profile. The intrinsic stress profile biases a free portion away from the substrate forming a loop winding. An anchor portion remains fixed to the substrate. The free portion end becomes a second anchor portion which may be connected to the substrate via soldering or plating. A series of individual coil structures can be joined via their anchor portions to form inductors and transformers.