- 专利标题: Internally reinforced bond pads
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申请号: US10249381申请日: 2003-04-03
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公开(公告)号: US06864578B2公开(公告)日: 2005-03-08
- 发明人: David Angell , Frederic Beaulieu , Takashi Hisada , Adreanne Kelly , Samuel Roy McKnight , Hiromitsu Miyai , Kevin Shawn Petrarca , Wolfgang Sauter , Richard Paul Volant , Caitlin W. Weinstein
- 申请人: David Angell , Frederic Beaulieu , Takashi Hisada , Adreanne Kelly , Samuel Roy McKnight , Hiromitsu Miyai , Kevin Shawn Petrarca , Wolfgang Sauter , Richard Paul Volant , Caitlin W. Weinstein
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理商 Ira D. Blecker
- 主分类号: H01L23/485
- IPC分类号: H01L23/485 ; H01L23/48 ; H01L23/52 ; H01L29/40
摘要:
Disclosed is a reinforced bond pad structure having nonplanar dielectric structures and a metallic bond layer conformally formed over the nonplanar dielectric structures. The nonplanar dielectric structures are substantially reproduced in the metallic bond layer so as to form nonplanar metallic structures. Surrounding each of the nonplanar metallic structures is a ring of dielectric material which provides a hard stop during probing of the bond pad so as to limit the amount of bond pad that can be removed during probing.
公开/授权文献
- US20040195642A1 Internally reinforced bond pads 公开/授权日:2004-10-07
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