发明授权
US06892927B2 Method and apparatus for bonding a wire to a bond pad on a device 失效
将导线接合到装置上的接合焊盘的方法和装置

Method and apparatus for bonding a wire to a bond pad on a device
摘要:
A method of bonding a wire to a bond pad on an electronic or photonic device is provided. A section of the wire is held within a bond head of the wirebonding apparatus. A laser beam is directed onto the bond pad. Energy of the laser beam heats the bond pad to the temperature that is higher than the temperature of the device. The bond head is subsequently moved toward the device to bring a portion of the wire into contact with the bond pad. Ultrasonic energy is provided to an interface between the portion of the wire and the bond pad.
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