发明授权
- 专利标题: System for damping oscillations
- 专利标题(中): 阻尼振荡系统
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申请号: US10075797申请日: 2002-02-12
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公开(公告)号: US06897599B2公开(公告)日: 2005-05-24
- 发明人: Franz Sorg , Stefan Xalter , Frank Melzer , Bernhard Gellrich , Michael Muehlbeyer
- 申请人: Franz Sorg , Stefan Xalter , Frank Melzer , Bernhard Gellrich , Michael Muehlbeyer
- 申请人地址: DE
- 专利权人: Carl Zeiss SMT AG
- 当前专利权人: Carl Zeiss SMT AG
- 当前专利权人地址: DE
- 代理机构: Wells St. John P.S.
- 优先权: DE10106605 20010213
- 主分类号: F16F15/00
- IPC分类号: F16F15/00 ; F16F15/02 ; F16L55/04 ; G03F7/20 ; H01L21/027 ; H01L41/09 ; H01L41/08
摘要:
In a system for overcoming or at least damping oscillations in or through channels (9) which carry fluid in a component, in particular coolant in cooling channels in an optical element (1), in particular a projection objective lens (1a) for semiconductor lithography, oscillations which occur are detected and evaluated by sensors (5), after which the result is passed, in the form of an adaptronic control loop to piezoelectric elements (9), which are integrated in the optical element, and are in the form of thin plates, films or layers which, when activated, produce the oscillations or frequencies which counteract oscillations and natural frequencies produced by the turbulence.
公开/授权文献
- US20020109437A1 System for damping oscillations 公开/授权日:2002-08-15