Invention Grant
- Patent Title: System and method for product yield prediction
- Patent Title (中): 产品产量预测的系统和方法
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Application No.: US10200045Application Date: 2002-07-18
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Publication No.: US06901564B2Publication Date: 2005-05-31
- Inventor: Brian E. Stine , Christopher Hess , John Kibarian , Kimon Michaels , Joseph C. Davis , Purnendu K. Mozumder , Sherry F. Lee , Larg H. Weiland , Dennis J. Ciplickas , David M. Stashower
- Applicant: Brian E. Stine , Christopher Hess , John Kibarian , Kimon Michaels , Joseph C. Davis , Purnendu K. Mozumder , Sherry F. Lee , Larg H. Weiland , Dennis J. Ciplickas , David M. Stashower
- Applicant Address: US CA San Jose
- Assignee: PDF Solutions, Inc.
- Current Assignee: PDF Solutions, Inc.
- Current Assignee Address: US CA San Jose
- Agency: Morrison & Foerster LLP
- Main IPC: H01L21/00
- IPC: H01L21/00 ; G01R31/26 ; G05B15/02 ; H01L21/02 ; H01L21/66 ; H01L23/544 ; G06F17/50 ; G06F19/00
Abstract:
A yield for an integrated circuit is predicted by processing a wafer to have a portion fabricated with at least one layout attribute of the integrated circuit. The portion of the wafer is analyzed to determine an actual yield associated with the at least one layout attribute. A systematic yield associated with the at least one layout attribute is determined based on the actual yield and a predicted yield associated with the at least one layout attribute. The predicted yield assumes that random defects are the only yield loss mechanism. A yield of an actual or proprosed product layout is predicted for the integrated circuit based on the systematic yield.
Public/Granted literature
- US20030145292A1 System and method for product yield prediction Public/Granted day:2003-07-31
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