Invention Grant
- Patent Title: Method and apparatus for simultaneously depositing and observing materials on a target
- Patent Title (中): 同时在目标上沉积和观察材料的方法和装置
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Application No.: US10842899Application Date: 2004-05-10
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Publication No.: US06906453B2Publication Date: 2005-06-14
- Inventor: Michael Mauck
- Applicant: Michael Mauck
- Applicant Address: US OR Portland
- Assignee: Coincident Beams Licensing Corporation
- Current Assignee: Coincident Beams Licensing Corporation
- Current Assignee Address: US OR Portland
- Agency: Chernoff, Vilhauer, McClung & Stenzel
- Main IPC: G21K1/00
- IPC: G21K1/00 ; C23C14/54 ; G21K1/093 ; G21K5/04 ; H01J3/07 ; H01J37/04 ; H01J37/147 ; H01J37/153 ; H01J37/21 ; H01J37/30 ; H01J37/317 ; H01L21/027 ; H05H7/06
Abstract:
A system for joining at least two beams of charged particles that includes directing a first beam along a first axis into a field. A second beam is directed along a second axis into the field. The first and second beams are turned, by interaction between the field and the first and second beams, into a third beam directed along a third axis.
Public/Granted literature
- US20040207308A1 Method and apparatus for simultaneously depositing and observing materials on a target Public/Granted day:2004-10-21
Information query
