Invention Grant
US06921913B2 Strained-channel transistor structure with lattice-mismatched zone
有权
具有晶格失配区的应变通道晶体管结构
- Patent Title: Strained-channel transistor structure with lattice-mismatched zone
- Patent Title (中): 具有晶格失配区的应变通道晶体管结构
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Application No.: US10379033Application Date: 2003-03-04
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Publication No.: US06921913B2Publication Date: 2005-07-26
- Inventor: Yee-Chia Yeo , Chun-Chieh Lin , Wen-Chin Lee , Chenming Hu
- Applicant: Yee-Chia Yeo , Chun-Chieh Lin , Wen-Chin Lee , Chenming Hu
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Thomas, Kayden, Horstemeyer & Risley
- Main IPC: H01L21/20
- IPC: H01L21/20 ; H01L21/28 ; H01L21/336 ; H01L29/51 ; H01L29/78 ; H01L29/06

Abstract:
A strained-channel transistor structure with lattice-mismatched zone and fabrication method thereof. The transistor structure includes a substrate having a strained channel region, comprising a first semiconductor material with a first natural lattice constant, in a surface, a gate dielectric layer overlying the strained channel region, a gate electrode overlying the gate dielectric layer, and a source region and drain region oppositely adjacent to the strained channel region, with one or both of the source region and drain region comprising a lattice-mismatched zone comprising a second semiconductor material with a second natural lattice constant different from the first natural lattice constant.
Public/Granted literature
- US20040173815A1 STRAINED-CHANNEL TRANSISTOR STRUCTURE WITH LATTICE-MISMATCHED ZONE Public/Granted day:2004-09-09
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