发明授权
US06921913B2 Strained-channel transistor structure with lattice-mismatched zone
有权
具有晶格失配区的应变通道晶体管结构
- 专利标题: Strained-channel transistor structure with lattice-mismatched zone
- 专利标题(中): 具有晶格失配区的应变通道晶体管结构
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申请号: US10379033申请日: 2003-03-04
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公开(公告)号: US06921913B2公开(公告)日: 2005-07-26
- 发明人: Yee-Chia Yeo , Chun-Chieh Lin , Wen-Chin Lee , Chenming Hu
- 申请人: Yee-Chia Yeo , Chun-Chieh Lin , Wen-Chin Lee , Chenming Hu
- 申请人地址: TW Hsinchu
- 专利权人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 当前专利权人地址: TW Hsinchu
- 代理机构: Thomas, Kayden, Horstemeyer & Risley
- 主分类号: H01L21/20
- IPC分类号: H01L21/20 ; H01L21/28 ; H01L21/336 ; H01L29/51 ; H01L29/78 ; H01L29/06
摘要:
A strained-channel transistor structure with lattice-mismatched zone and fabrication method thereof. The transistor structure includes a substrate having a strained channel region, comprising a first semiconductor material with a first natural lattice constant, in a surface, a gate dielectric layer overlying the strained channel region, a gate electrode overlying the gate dielectric layer, and a source region and drain region oppositely adjacent to the strained channel region, with one or both of the source region and drain region comprising a lattice-mismatched zone comprising a second semiconductor material with a second natural lattice constant different from the first natural lattice constant.
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