发明授权
US06921913B2 Strained-channel transistor structure with lattice-mismatched zone 有权
具有晶格失配区的应变通道晶体管结构

Strained-channel transistor structure with lattice-mismatched zone
摘要:
A strained-channel transistor structure with lattice-mismatched zone and fabrication method thereof. The transistor structure includes a substrate having a strained channel region, comprising a first semiconductor material with a first natural lattice constant, in a surface, a gate dielectric layer overlying the strained channel region, a gate electrode overlying the gate dielectric layer, and a source region and drain region oppositely adjacent to the strained channel region, with one or both of the source region and drain region comprising a lattice-mismatched zone comprising a second semiconductor material with a second natural lattice constant different from the first natural lattice constant.
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