Invention Grant
- Patent Title: Fuse structure and method to form the same
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Application No.: US09992344Application Date: 2001-11-14
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Publication No.: US06927472B2Publication Date: 2005-08-09
- Inventor: David K. Anderson , Tien-Jen Cheng , Timothy J. Dalton , Christopher V. Jahnes , Andrew Lu , Chandrasekhar Narayan , Kevin S. Petrarca , Richard P. Volant , George F. Walker
- Applicant: David K. Anderson , Tien-Jen Cheng , Timothy J. Dalton , Christopher V. Jahnes , Andrew Lu , Chandrasekhar Narayan , Kevin S. Petrarca , Richard P. Volant , George F. Walker
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: McGinn & Gibb, PLLC
- Agent Ira D. Blecker, Esq.
- Main IPC: H01L23/525
- IPC: H01L23/525 ; H01L21/336

Abstract:
A method and structure for a fuse structure comprises an insulator layer, a plurality of fuse electrodes extending through the insulator layer to an underlying wiring layer, an electroplated fuse element connected to the electrodes, and an interface wall. The fuse element is positioned external to the insulator, with a gap juxtaposed between the insulator and the fuse element. The interface wall further comprises a first side wall, a second side wall, and an inner wall, wherein the inner wall is disposed within the gap. The fuse electrodes are diametrically opposed to one another, and the fuse element is perpendicularly disposed above the fuse electrodes. The fuse element is either electroplatted, electroless plated, or is an ultra thin fuse.
Public/Granted literature
- US20030089962A1 Fuse structure and method to form the same Public/Granted day:2003-05-15
Information query
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