发明授权
- 专利标题: System and method for measuring optical distance
- 专利标题(中): 用于测量光学距离的系统和方法
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申请号: US10024455申请日: 2001-12-18
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公开(公告)号: US06934035B2公开(公告)日: 2005-08-23
- 发明人: Changhuei Yang , Adam Wax , Ramachandra R. Dasari , Michael S. Feld
- 申请人: Changhuei Yang , Adam Wax , Ramachandra R. Dasari , Michael S. Feld
- 申请人地址: US MA Cambridge
- 专利权人: Massachusetts Institute of Technology
- 当前专利权人: Massachusetts Institute of Technology
- 当前专利权人地址: US MA Cambridge
- 代理机构: Weingarten, Schurgin, Gagnebin & Lebovici LLP
- 主分类号: A61B3/10
- IPC分类号: A61B3/10 ; G01B9/02 ; G01B11/00 ; G01B11/02 ; G01J9/04 ; G01N21/17 ; G01N21/45
摘要:
The methods of the present invention are directed at an accurate phase-based technique for measuring arbitrarily long optical distances with sub-nanometer precision. A preferred embodiment of the present invention method employs a interferometer, for example, a Michelson interferometer, with a pair of harmonically related light sources, one continuous wave (CW) and a second source having low coherence. By slightly adjusting the center wavelength of the low coherence source between scans of the target sample, the phase relationship between the heterodyne signals of the CW and low coherence light is used to measure the separation between reflecting interfaces with sub-nanometer precision. As the preferred embodiment of this method is completely free of 2π ambiguity, an issue that plagues most phase-based techniques, it can be used to measure arbitrarily long optical distances without loss of precision.
公开/授权文献
- US20030112444A1 System and method for measuring optical distance 公开/授权日:2003-06-19
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