发明授权
US06950179B2 Shape measuring apparatus, shape measuring method, and aligning method
失效
形状测量装置，形状测量方法和对准方法
- 专利标题： Shape measuring apparatus, shape measuring method, and aligning method
- 专利标题（中）： 形状测量装置，形状测量方法和对准方法
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申请号： US10156921申请日： 2002-05-30
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公开(公告)号： US06950179B2公开(公告)日： 2005-09-27
- 发明人: Hideki Ina , Koichi Sentoku , Takahiro Matsumoto
- 申请人： Hideki Ina , Koichi Sentoku , Takahiro Matsumoto
- 申请人地址： JP Tokyo
- 专利权人： Canon Kabushiki Kaisha
- 当前专利权人： Canon Kabushiki Kaisha
- 当前专利权人地址： JP Tokyo
- 代理机构： Fitzpatrick, Cella, Harper, & Scinto
- 优先权： JP2001/162587 20010530
- 主分类号： G01B11/22
- IPC分类号： G01B11/22 ; B24B49/10 ; B24B49/12 ; G01B11/24 ; G01B21/00 ; G01B21/02 ; G01B21/20 ; G01Q10/02 ; G01Q30/02 ; G01Q60/00 ; G01Q60/24 ; G01Q60/34 ; G01Q60/38 ; G01Q80/00 ; G03F9/00 ; G01N21/00 ; G01N23/00
摘要：
A shape measuring method for measuring a shape of a surface of an object. The method includes a first measuring step for measuring the surface of the object by detecting light from the object, and a second measuring step for measuring the surface of the object by relatively scanning a probe and the object. A scanning speed changes on the basis of the result of the first measurement step.
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