Invention Grant
US06952022B2 Image sensor comprising thin film transistor optical sensor having offset region
有权
图像传感器包括具有偏移区域的薄膜晶体管光学传感器
- Patent Title: Image sensor comprising thin film transistor optical sensor having offset region
- Patent Title (中): 图像传感器包括具有偏移区域的薄膜晶体管光学传感器
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Application No.: US10732320Application Date: 2003-12-09
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Publication No.: US06952022B2Publication Date: 2005-10-04
- Inventor: Jin Jang , Ji Ho Hur , Hyun Chul Nam
- Applicant: Jin Jang , Ji Ho Hur , Hyun Chul Nam
- Applicant Address: KR Seoul
- Assignee: Silicon Display Technology
- Current Assignee: Silicon Display Technology
- Current Assignee Address: KR Seoul
- Agency: Morgan & Finnegan LLP
- Priority: KR10-2003-0054468 20030806
- Main IPC: H01L29/786
- IPC: H01L29/786 ; H01L27/146 ; H01L31/0376 ; H01L31/10 ; H01L29/04

Abstract:
The present invention relates to an image sensor comprising an amorphous silicon thin-film transistor optical sensor which functions as an image sensor used for an X-ray photography device, a fingerprint recognition apparatus, a scanner, etc., and a method of manufacturing the image sensor. Since the thin-film transistor optical sensor according to the present invention has a high-resistance silicon region by disposing an offset region in a channel region, a dark leakage current of the optical sensor remains in a low level even under a high voltage. Therefore, it is possible to apply a high voltage to the thin-film transistor optical sensor according to the present invention so that the image senor can be sensitive to a weak light. In addition, since the storage capacitance in the image sensor is formed in a double structure, the image sensor has a high value of capacitance. Furthermore, since a lower common electrode is electrically connected to an upper common electrode, the image sensor has a stable structure.
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