发明授权
US06955264B2 Method of detecting protrusion of inspection object from palette and method of fabricating semiconductor device 失效
从调色板检测检查对象的突起的方法和制造半导体器件的方法

Method of detecting protrusion of inspection object from palette and method of fabricating semiconductor device
摘要:
In order to provide a method of detecting protrusion of an inspection object from a palette improved to be capable of making highly precise detection and reducing a socket breakage ratio, an inspection object is introduced into each of a plurality of pockets provided on the surface of a palette, which in turn is transported. A reflection level of the inspection object stored in each of the plurality of pockets is measured every palette with a reflection type photoelectric sensor. The maximum value and the minimum value of the reflection level are obtained from data of every palette, for calculating a dispersion width defined by the difference between the maximum value and the minimum value. The dispersion width is compared with a previously set determination threshold, for determining whether or not the dispersion width is greater than the determination threshold.
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