Method of detecting protrusion of inspection object from palette and method of fabricating semiconductor device
    2.
    发明授权
    Method of detecting protrusion of inspection object from palette and method of fabricating semiconductor device 失效
    从调色板检测检查对象的突起的方法和制造半导体器件的方法

    公开(公告)号:US06955264B2

    公开(公告)日:2005-10-18

    申请号:US10145154

    申请日:2002-05-15

    IPC分类号: G01R31/26 G01N21/956 B07C5/00

    CPC分类号: G01N21/956

    摘要: In order to provide a method of detecting protrusion of an inspection object from a palette improved to be capable of making highly precise detection and reducing a socket breakage ratio, an inspection object is introduced into each of a plurality of pockets provided on the surface of a palette, which in turn is transported. A reflection level of the inspection object stored in each of the plurality of pockets is measured every palette with a reflection type photoelectric sensor. The maximum value and the minimum value of the reflection level are obtained from data of every palette, for calculating a dispersion width defined by the difference between the maximum value and the minimum value. The dispersion width is compared with a previously set determination threshold, for determining whether or not the dispersion width is greater than the determination threshold.

    摘要翻译: 为了提供一种检测检查对象从调色板突出的方法,其能够进行高精度检测和减小插座断裂率,将检查对象引入到设置在 调色板,反过来被运输。 每个调色板用反射型光电传感器测量存储在多个凹穴中的每一个中的检查对象的反射水平。 从每个调色板的数据获得反射电平的最大值和最小值,用于计算由最大值和最小值之间的差定义的色散宽度。 将色散宽度与先前设置的确定阈值进行比较,以确定色散宽度是否大于确定阈值。

    Transporting apparatus for semiconductor device
    7.
    发明授权
    Transporting apparatus for semiconductor device 失效
    半导体器件输送装置

    公开(公告)号:US6163145A

    公开(公告)日:2000-12-19

    申请号:US917922

    申请日:1997-08-27

    CPC分类号: G01R1/06705

    摘要: A transporting apparatus used in testing a plurality of semiconductor devices includes a magazine in which a plurality of pallets are stacked in plural stages, each pallet with a plurality of semiconductor device placed thereon; a distributing stocker mechanism for placing the plurality of pallets in the magazine onto a carrier; a carrier transporting mechanism for transporting the carrier into a test station in a constant temperature room and transporting the carrier after to outside the constant temperature room; and a recovery stocker mechanism for recovering the plurality of pallets after test on the carrier into the magazine. Thus, the transporting apparatus with high installing area efficiency and high test efficiency can be fabricated at low production cost.

    摘要翻译: 用于测试多个半导体器件的传送装置包括多个托盘以多个层叠的盒子,每个托盘上放置有多个半导体器件; 用于将所述多个托盘放置在所述盒中的分配储存器机构到载体上; 载体输送机构,用于将载体输送到恒温室内的试验台,并将载体运送到恒温室外; 以及回收储存器机构,用于在载体上测试之后将多个托盘回收到料盒中。 因此,可以以低生产成本制造具有高安装面积效率和高测试效率的输送装置。