发明授权
- 专利标题： Device for fixing thin and flexible substrates
- 专利标题（中）： 用于固定薄而柔性基板的装置
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申请号： US10631330申请日： 2003-07-31
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公开(公告)号： US06966560B2公开(公告)日： 2005-11-22
- 发明人: Walter Demel , Ralph Zoberbier
- 申请人： Walter Demel , Ralph Zoberbier
- 申请人地址： DE Garching
- 专利权人： Suss MicroTec Lithography GmbH
- 当前专利权人： Suss MicroTec Lithography GmbH
- 当前专利权人地址： DE Garching
- 代理机构： Perman & Green, LLP.
- 优先权： DE10235482 20020802
- 主分类号： G03F7/20
- IPC分类号： G03F7/20 ; B23Q3/08 ; H01L21/027 ; H01L21/683 ; B23B31/30
摘要：
A device or chuck for fixing thin and/or flexible substrates allows a uniform and all-over sucking-up of the substrates without any disadvantageous warping or bending. The chuck has notches and holes communicating with a plurality of microgrooves arranged on the bearing surface. If a vacuum device sucks off air through the bores and the notches, a vacuum extends in the microgrooves so that a substrate located on the bearing surface is sucked up.
公开/授权文献
- US20040104326A1 Device for fixing thin and flexible substrates 公开/授权日：2004-06-03