- 专利标题： Semiconductor memory device and manufacturing method thereof
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申请号： US10183669申请日： 2002-06-28
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公开(公告)号： US06995058B2公开(公告)日： 2006-02-07
- 发明人: Kazufumi Suenaga , Kiyoshi Ogata , Kazuhiko Horikoshi , Jun Tanaka , Hisayuki Kato , Keiichi Yoshizumi , Hisahiko Abe
- 申请人： Kazufumi Suenaga , Kiyoshi Ogata , Kazuhiko Horikoshi , Jun Tanaka , Hisayuki Kato , Keiichi Yoshizumi , Hisahiko Abe
- 申请人地址： JP Tokyo
- 专利权人： Renesas Technology Corp.
- 当前专利权人： Renesas Technology Corp.
- 当前专利权人地址： JP Tokyo
- 代理机构： Antonelli, Terry, Stout & Kraus, LLP
- 优先权： JP10-097117 19980409
- 主分类号： H01L21/8242
- IPC分类号： H01L21/8242
摘要：
The present invention is a high quality semiconductor memory device using a ferroelectric thin film capacitor as a memory capacitor at a high manufacturing yield, the ferroelectric thin film of the capacitor is specified such that the relative standard deviation of crystal grain sizes is 13% or less, to thereby ensure a high remanent polarization value and a small film fatigue (large rewritable number).
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