Invention Grant
US07064446B2 Under bump metallization layer to enable use of high tin content solder bumps
失效
凸块下金属化层能够使用高锡含量的焊锡凸块
- Patent Title: Under bump metallization layer to enable use of high tin content solder bumps
- Patent Title (中): 凸块下金属化层能够使用高锡含量的焊锡凸块
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Application No.: US10812464Application Date: 2004-03-29
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Publication No.: US07064446B2Publication Date: 2006-06-20
- Inventor: John P. Barnak , Gerald B. Feldewerth , Ming Fang , Kevin J. Lee , Tzuen-Luh Huang , Harry Y. Liang , Seshu V. Sattiraju , Margherita Chang , Andrew W. H. Yeoh
- Applicant: John P. Barnak , Gerald B. Feldewerth , Ming Fang , Kevin J. Lee , Tzuen-Luh Huang , Harry Y. Liang , Seshu V. Sattiraju , Margherita Chang , Andrew W. H. Yeoh
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agent Rob G. Winkle
- Main IPC: H01L23/48
- IPC: H01L23/48 ; H01L23/52 ; H01L29/40

Abstract:
Apparatus and methods of fabricating an under bump metallization structure including an adhesion layer abutting a conductive pad, a molybdenum-containing barrier layer abutting the adhesion layer, a wetting layer abutting the molybdenum-containing barrier layer, and high tin content solder material abutting the wetting layer. The wetting layer may be substantially subsumed in the high content solder forming an intermetallic compound layer. The molybdenum-containing barrier layer prevents the movement of tin in the high tin content solder material from migrating to dielectric layers abutting the conductive pad and potentially causing delamination and/or attacking any underlying structures, particularly copper structures, which may be present.
Public/Granted literature
- US20050212133A1 UNDER BUMP METALLIZATION LAYER TO ENABLE USE OF HIGH TIN CONTENT SOLDER BUMPS Public/Granted day:2005-09-29
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