发明授权
- 专利标题: Fast model-based optical proximity correction
- 专利标题(中): 基于快速模型的光学邻近校正
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申请号: US10783938申请日: 2004-02-20
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公开(公告)号: US07079223B2公开(公告)日: 2006-07-18
- 发明人: Alan E. Rosenbluth , Gregg M. Gallatin , Ronald L. Gordon , Nakgeuon Seong , Alexey Y. Lvov , William D. Hinsberg , John A. Hoffnagle , Frances A. Houle , Martha I. Sanchez
- 申请人: Alan E. Rosenbluth , Gregg M. Gallatin , Ronald L. Gordon , Nakgeuon Seong , Alexey Y. Lvov , William D. Hinsberg , John A. Hoffnagle , Frances A. Houle , Martha I. Sanchez
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理商 Ira D. Blecker
- 主分类号: G03B27/42
- IPC分类号: G03B27/42
摘要:
A method and system is provided for computing lithographic images that may take into account non-scalar effects such as lens birefringence, resist stack effects, tailored source polarizations, and blur effects of the mask and the resist. A generalized bilinear kernel is formed, which is independent of the mask transmission function, and which may then be treated using a decomposition to allow rapid computation of an image that includes such non-scalar effects. Weighted pre-images may be formed from a coherent sum of pre-computed convolutions of the dominant eigenfunctions of the generalized bilinear kernel with the appropriate mask polygon sectors. The image at a point may be formed from the incoherent sum of the weighted pre-images over all of the dominant eigenfunctions of the generalized bilinear kernel. The resulting image can then be used to perform model-based optical proximity correction (MBOPC).
公开/授权文献
- US20050185159A1 Fast model-based optical proximity correction 公开/授权日:2005-08-25
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