Invention Grant
- Patent Title: Method of integrating optical devices and electronic devices on an integrated circuit
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Application No.: US10989940Application Date: 2004-11-15
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Publication No.: US07109051B2Publication Date: 2006-09-19
- Inventor: Nigel G. Cave , Omar Zia
- Applicant: Nigel G. Cave , Omar Zia
- Applicant Address: US TX Austin
- Assignee: Freescale Semiconductor, Inc.
- Current Assignee: Freescale Semiconductor, Inc.
- Current Assignee Address: US TX Austin
- Agent Michael J. Balconi-Lami
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L21/338
Abstract:
A method for integrating an optical device and an electronic device on a semiconductor substrate comprises forming openings within an active semiconductor layer in a first region of the semiconductor substrate, wherein the first region corresponds to an electronic device portion and the second region corresponds to an optical device portion. A semiconductor layer is epitaxially grown overlying an exposed active semiconductor layer in the second region, the epitaxially grown semiconductor layer corresponding to an optical device region. At least a portion of an electronic device is formed on the active semiconductor layer within the electronic device portion of the semiconductor substrate. The method further includes forming openings within the epitaxially grown semiconductor layer of the optical device portion of the semiconductor substrate, wherein the openings define one or more features of an optical device.
Public/Granted literature
- US20060105479A1 Method of integrating optical devices and electronic devices on an integrated circuit Public/Granted day:2006-05-18
Information query
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