发明授权
- 专利标题: Tunable sensor
- 专利标题(中): 可调谐传感器
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申请号: US10749710申请日: 2003-12-31
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公开(公告)号: US07145143B2公开(公告)日: 2006-12-05
- 发明人: Roland A. Wood , Barrett E. Cole , Robert E. Higashi , Daniel W. Youngner
- 申请人: Roland A. Wood , Barrett E. Cole , Robert E. Higashi , Daniel W. Youngner
- 申请人地址: US NJ Morristown
- 专利权人: Honeywell International Inc.
- 当前专利权人: Honeywell International Inc.
- 当前专利权人地址: US NJ Morristown
- 代理商 Kris T. Fredrick
- 主分类号: G01B9/02
- IPC分类号: G01B9/02 ; G01J3/45
摘要:
A tunable bolometer device for detecting infrared light (IR) from a target at specific frequencies and in a broadband mode. The device may have an array of pixels of which each is controllable to be sensitive to a particular wavelength of light that is selected and detected. The detection of particular frequencies on a pixel level may result in spectral analysis of the target. Further, each pixel of the bolometer via an associated etalon may be tuned to detect a different frequency of IR or be switched to broadband detection of IR. The device may be packaged in an integrated vacuum package where the etalon array becomes the topcap which is bonded to the wafer containing the bolometer array.
公开/授权文献
- US20040217264A1 Tunable sensor 公开/授权日:2004-11-04
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