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公开(公告)号：US07145143B2
公开(公告)日：2006-12-05
申请号：US10749710
申请日：2003-12-31
CPC分类号： G01J3/26 , G01B11/272 , G01J3/36 , G01J3/427 , G01J5/023 , G01J5/10 , G01J5/20 , G02B5/284 , G02B26/001 , H01L27/14621 , H01L31/02024 , H01L31/02162 , H01L31/02325 , H01L2224/48091 , H01L2224/73204 , H01L2924/00014
摘要： A tunable bolometer device for detecting infrared light (IR) from a target at specific frequencies and in a broadband mode. The device may have an array of pixels of which each is controllable to be sensitive to a particular wavelength of light that is selected and detected. The detection of particular frequencies on a pixel level may result in spectral analysis of the target. Further, each pixel of the bolometer via an associated etalon may be tuned to detect a different frequency of IR or be switched to broadband detection of IR. The device may be packaged in an integrated vacuum package where the etalon array becomes the topcap which is bonded to the wafer containing the bolometer array.
摘要翻译： 一种用于在特定频率和宽带模式下从目标检测红外光（IR）的可调式辐射热量计装置。 该装置可以具有其每个可控制的像素阵列，以对被选择和检测的特定波长的光敏感。 像素级别上的特定频率的检测可能导致目标的频谱分析。 此外，测辐射热计的每个像素通过相关联的标准具可被调谐以检测IR的不同频率或被切换到IR的宽带检测。 该器件可以封装在集成的真空封装中，其中标准具阵列变成顶盖，其结合到包含测辐射热计阵列的晶片。
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公开(公告)号：US07170059B2
公开(公告)日：2007-01-30
申请号：US10678527
申请日：2003-10-03
IPC分类号： G01J5/00
CPC分类号： H01L27/14649 , G01J5/20
摘要： A thermal sensor structure having one level for an infrared detecting pixel including the sensor associated electronics. The electronics displace a small area thereby having little effect on the fill area of the pixel relative to a level having no pixel electronics. That level has thermally isolation for the substrate through the limited structural attachment to the substrate because of the access vias to the silicon. It has additional isolation because of a pit of removed silicon from the substrate below that one level. The thermal sensor may have an array with a large number of pixels having the one level for the pixels and electronics structure.
摘要翻译： 一种热传感器结构，其具有用于红外检测像素的一个级别，该像素包括与传感器相关 电子装置移动一个小区域，从而对像素的填充面积相对于没有像素电子装置的水平几乎没有影响。 由于通向硅的通路，该水平通过与衬底的有限结构连接而对衬底进行热隔离。 它具有额外的隔离，因为从低于该水平面的衬底去除硅的坑。 热传感器可以具有具有用于像素和电子结构的一个级别的大量像素的阵列。
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公开(公告)号：US20110279680A1
公开(公告)日：2011-11-17
申请号：US13105176
申请日：2011-05-11
申请人： Barrett E. Cole , Robert E. Higashi
发明人： Barrett E. Cole , Robert E. Higashi
IPC分类号： H04N5/33
CPC分类号： H04N5/2251 , H04N5/33
摘要： An infrared camera includes a lens to receive infrared radiation from an image to be viewed. A thermal detector is positioned to receive the infrared radiation from the lens and vary the amount of light transmitted through the thermal detector responsive to the infrared radiation.
摘要翻译： 红外线摄像机包括用于从要被观看的图像接收红外辐射的透镜。 定位热检测器以接收来自透镜的红外辐射，并根据红外辐射改变透过热探测器的光量。
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公开(公告)号：US07628907B2
公开(公告)日：2009-12-08
申请号：US11162060
申请日：2005-08-26
申请人： Yuandong Gu , Barrett E. Cole , Robert E. Higashi
发明人： Yuandong Gu , Barrett E. Cole , Robert E. Higashi
CPC分类号： G01N25/4846 , G01N33/004 , Y02A50/244
摘要： A gas sensor is provided for detecting one or more gases in a gas sample. The gas sensor includes a substrate, a solid electrolyte layer including lanthanum oxide for sensing carbon dioxide, a heating element thermally coupled to the solid electrolyte layer, and a controller coupled to the heating element and the solid electrolyte layer. The controller heats the heating element so that the solid electrolyte layer reaches an operating. Methods of sensing carbon dioxide and humidity are also disclosed.
摘要翻译： 气体传感器用于检测气体样品中的一种或多种气体。 气体传感器包括基板，包括用于感测二氧化碳的氧化镧的固体电解质层，与固体电解质层热耦合的加热元件，以及耦合到加热元件和固体电解质层的控制器。 控制器加热加热元件使得固体电解质层达到操作。 还公开了检测二氧化碳和湿度的方法。
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公开(公告)号：US07329853B2
公开(公告)日：2008-02-12
申请号：US11266455
申请日：2005-11-03
CPC分类号： G02B5/284 , G01B11/272 , G01J3/26 , G01J3/36 , G01J3/427 , G01J5/20 , G02B26/001 , H01L27/14621 , H01L31/02024 , H01L31/02162 , H01L31/02325 , H01L2224/05568 , H01L2224/05573 , H01L2224/13 , H01L2224/48091 , H01L2924/00014
摘要： A spectrally tunable optical detector and methods of manufacture therefore are provided. In one illustrative embodiment, the tunable optical detector includes a tunable bandpass filter, a detector and readout electronics, each supported by a different substrate. The substrates are secured relative to one another to form the spectrally tunable optical detector.
摘要翻译： 因此，提供了光谱可调光学检测器及其制造方法。 在一个说明性实施例中，可调谐光学检测器包括可调谐带通滤波器，检测器和读出电子器件，每个由不同的衬底支撑。 基板相对于彼此固定以形成光谱可调谐光学检测器。
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公开(公告)号：US07391147B2
公开(公告)日：2008-06-24
申请号：US10735531
申请日：2003-12-12
申请人： Barrett E. Cole , Robert E. Higashi
发明人： Barrett E. Cole , Robert E. Higashi
IPC分类号： H05H7/06
CPC分类号： G01J1/429
摘要： A light detector having a cathode wafer, a cavity wafer and an anode wafer. The cathode wafer may be bonded to one side of the cavity wafer and the anode wafer may be bonded to another side of the cavity wafer. The cathode wafer may have numerous cathodes, the anode wafer numerous anodes and the cavity wafer numerous cavities which may be aligned on a one-to-one basis to form a wafer structure of a plurality of detectors which may be diced into separable detector chips. When there is a voltage potential across a cathode and an anode, and a gas such as Ne or the like in the cavity, a reception of light such as ultra violet may result in an electronic discharge between the cathode and anode of the light detector.
摘要翻译： 具有阴极晶片，空腔晶片和阳极晶片的光检测器。 阴极晶片可以结合到空腔晶片的一侧，并且阳极晶片可以结合到空腔晶片的另一侧。 阴极晶片可以具有许多阴极，阳极晶片许多阳极和空腔晶片可以在一对一的基础上对准多个空腔，以形成可以切成可分离的检测器芯片的多个检测器的晶片结构。 当在阴极和阳极之间存在电压电势，并且在空腔中存在诸如Ne等的气体时，诸如紫外线的光的接收可能导致光检测器的阴极和阳极之间的电子放电。
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公开(公告)号：US07230432B2
公开(公告)日：2007-06-12
申请号：US11151902
申请日：2005-06-14
申请人： Barrett E. Cole , Robert E. Higashi
发明人： Barrett E. Cole , Robert E. Higashi
IPC分类号： G01N27/62
CPC分类号： G01N27/4146 , Y10S977/953
摘要： A sensor having a nanotube grown on and supported by thermal bimorph structures. The nanotube rests on a heat sink during sensing gas or a liquid and is moved from the heat sink when the nanotube is heated to desorb gas or liquid from it. The heatsink may function as a gate along with the bimorph structures as the other terminals of a transistor. Current-voltage and current-gate voltage characteristics may be obtained of the nanotube as a device like a transistor. These characteristics may provide information on a gas or liquid absorbed by the nanotube.
摘要翻译： 具有生长在热双晶体结构上并由其支撑的纳米管的传感器。 在感测气体或液体期间，纳米管位于散热器上，并且当加热纳米管以从其中解吸气体或液体时，其从散热器移动。 作为晶体管的其他端子，散热器可以与双压电晶片结构一起作为栅极。 作为像晶体管的器件，可以获得电流 - 电压和电流 - 栅极电压特性。 这些特性可以提供关于纳米管吸收的气体或液体的信息。
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公开(公告)号：US20090283759A1
公开(公告)日：2009-11-19
申请号：US12119872
申请日：2008-05-13
申请人： Barrett E. Cole , Robert E. Higashi
发明人： Barrett E. Cole , Robert E. Higashi
CPC分类号： H01L27/14669 , H01L27/14689
摘要： A metal oxide semiconductor (MOS) device includes a substrate, a lower sacrificial membrane adjacent to the substrate, an upper thin film structure adjacent to the lower membrane, and a MOS material deposited on the upper thin film structure.
摘要翻译： 金属氧化物半导体（MOS）器件包括衬底，与衬底相邻的下牺牲膜，邻近下膜的上薄膜结构和沉积在上薄膜结构上的MOS材料。
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公开(公告)号：US07470894B2
公开(公告)日：2008-12-30
申请号：US11383380
申请日：2006-05-15
IPC分类号： H01J5/02
CPC分类号： G01J3/02 , G01J3/0256 , G01J3/26 , H01L31/02162 , H01L31/105 , H01L31/109
摘要： A multi-substrate package assembly having a first substrate, a second substrate and a package, each with a number of bond pads. The package includes a cavity for receiving either or both of the first and second substrates, with a number of bond pads positioned along at least part of the periphery of the cavity. The first substrate and the second substrate are preferably positioned in the cavity of the package, with selected bond pads of the first substrate and second substrate electrically connected to selected bond pads of the package. In some embodiments, the bond pads of the first substrate are only connected to bond pads on one or more sides of the cavity, and the bond pads of the second substrate are only connected to bond pads on one or more of the remaining sides of the cavity. The packaging assembly of the present invention can be used in many applications, including spectrally tunable optical detectors.
摘要翻译： 一种具有第一基板，第二基板和封装的多基板封装组件，每个具有多个接合焊盘。 该封装包括用于接收第一和第二基板中的一个或两个的空腔，其中多个接合焊盘沿着空腔的至少一部分周边定位。 第一基板和第二基板优选地定位在封装的空腔中，其中第一基板和第二基板的选定的接合焊盘电连接到封装的选定的接合焊盘。 在一些实施例中，第一衬底的接合焊盘仅连接到空腔的一侧或多侧上的接合焊盘，并且第二衬底的接合焊盘仅连接到第一衬底的一个或多个侧面上的接合焊盘 腔。 本发明的包装组件可用于许多应用中，包括光谱可调光学检测器。
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公开(公告)号：US06949931B2
公开(公告)日：2005-09-27
申请号：US10304351
申请日：2002-11-26
申请人： Barrett E. Cole , Robert E. Higashi
发明人： Barrett E. Cole , Robert E. Higashi
IPC分类号： G01N27/00 , G01N27/414 , G01N27/62
CPC分类号： G01N27/4146 , Y10S977/953
摘要： A sensor having a nanotube grown on and supported by thermal bimorph structures. The nanotube rests on a heat sink during sensing gas or a liquid and is moved from the heat sink when the nanotube is heated to desorb gas or liquid from it. The heatsink may function as a gate along with the bimorph structures as the other terminals of a transistor. Current-voltage and current-gate voltage characteristics may be obtained of the nanotube as a device like a transistor. These characteristics may provide information on a gas or liquid absorbed by the nanotube.
摘要翻译： 具有生长在热双晶体结构上并由其支撑的纳米管的传感器。 在感测气体或液体期间，纳米管位于散热器上，并且当加热纳米管以从其中解吸气体或液体时，其从散热器移动。 作为晶体管的其他端子，散热器可以与双压电晶片结构一起作为栅极。 作为像晶体管的器件，可以获得电流 - 电压和电流 - 栅极电压特性。 这些特性可以提供关于纳米管吸收的气体或液体的信息。
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