发明授权
US07196457B2 Piezoelectric film, piezoelectric element, piezoelectric actuator, piezoelectric pump, ink-jet type recording head, ink-jet printer, surface-acoustic-wave element, thin-film piezoelectric resonator, frequency filter, oscillator, electronic circuit, and electronic apparatus
有权
压电膜,压电元件,压电致动器,压电泵,喷墨式记录头,喷墨打印机,表面声波元件,薄膜压电谐振器,频率滤波器,振荡器,电子电路和电子设备
- 专利标题: Piezoelectric film, piezoelectric element, piezoelectric actuator, piezoelectric pump, ink-jet type recording head, ink-jet printer, surface-acoustic-wave element, thin-film piezoelectric resonator, frequency filter, oscillator, electronic circuit, and electronic apparatus
- 专利标题(中): 压电膜,压电元件,压电致动器,压电泵,喷墨式记录头,喷墨打印机,表面声波元件,薄膜压电谐振器,频率滤波器,振荡器,电子电路和电子设备
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申请号: US10970697申请日: 2004-10-21
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公开(公告)号: US07196457B2公开(公告)日: 2007-03-27
- 发明人: Hiromu Miyazawa , Takeshi Kijima , Eiji Natori , Taku Aoyama , Setsuya Iwashita , Takamitsu Higuchi
- 申请人: Hiromu Miyazawa , Takeshi Kijima , Eiji Natori , Taku Aoyama , Setsuya Iwashita , Takamitsu Higuchi
- 申请人地址: JP
- 专利权人: Seiko Epson Corporation
- 当前专利权人: Seiko Epson Corporation
- 当前专利权人地址: JP
- 代理机构: Harness, Dickey & Pierce, P.L.C.
- 优先权: JP2003-363196 20031023; JP2004-277859 20040924
- 主分类号: H01L41/187
- IPC分类号: H01L41/187 ; B41J2/045
摘要:
A piezoelectric film is provided having good piezoelectric properties. The piezoelectric film is represented by the following general formula: A1−bB1−aXaO3 wherein A contains Pb; B is at least one of Zr and Ti; X is at least one of V, Nb, Ta, Cr, Mo and W; a satisfies 0.05≦a≦0.3; and b satisfies 0.025≦b≦0.15.
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