Invention Grant
- Patent Title: Lift pin assembly for substrate processing
- Patent Title (中): 提升销组件进行基板加工
-
Application No.: US10428967Application Date: 2003-05-01
-
Publication No.: US07204888B2Publication Date: 2007-04-17
- Inventor: Toan Q. Tran , Daniel S. Herkalo , Yen-Kun V. Wang , Jin Ho Lee , Dong Hyung Lee , Jang Seok Oh , Won B. Bang
- Applicant: Toan Q. Tran , Daniel S. Herkalo , Yen-Kun V. Wang , Jin Ho Lee , Dong Hyung Lee , Jang Seok Oh , Won B. Bang
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Townsend and Townsend and Crew LLP
- Main IPC: C23C16/00
- IPC: C23C16/00 ; C23F1/00 ; H01L21/306

Abstract:
Embodiments of the present invention provide an apparatus for constraining and supporting the lift pins to prevent or minimize lateral movement of the lift pins that causes substrate hand-off problems and associated degradation in substrate processing characteristics and results. In one embodiment, a lift pin assembly for manipulating a substrate above a support surface of a substrate support comprises a plurality of lift pins movable between an up position and a down position. The lift pins include top ends and bottom ends. The top ends are configured to be lifted above the support surface of the substrate support to contact a bottom surface of the substrate in the up position. The top ends are configured to be positioned at or below the support surface of the substrate support in the down position. A lift pin connecting member is attached to the plurality of lift pins at attachment locations at or near the bottom ends of the lift pins to maintain fixed relative distances between the lift pins at the attachment locations and to move with the lift pins between the up position and the down position.
Public/Granted literature
- US20040219006A1 Lift pin assembly for substrate processing Public/Granted day:2004-11-04
Information query
IPC分类: