发明授权
- 专利标题: Moving mechanism with high bandwidth response and low force transmissibility
- 专利标题(中): 具有高带宽响应和低力传递性的移动机构
-
申请号: US10918182申请日: 2004-08-13
-
公开(公告)号: US07333179B2公开(公告)日: 2008-02-19
- 发明人: Bausan Yuan , Martin E. Lee , W. Thomas Novak
- 申请人: Bausan Yuan , Martin E. Lee , W. Thomas Novak
- 申请人地址: JP
- 专利权人: Nikon Corporation
- 当前专利权人: Nikon Corporation
- 当前专利权人地址: JP
- 代理机构: Aka Chan LLP
- 主分类号: G03B27/58
- IPC分类号: G03B27/58 ; G03B27/62
摘要:
Methods and apparatus for providing a stage with a relatively high positioning bandwidth and low transmissibility are disclosed. According to one aspect of the present invention, a method for positioning a stage including providing a first force of a first magnitude to the stage using a primary actuator and providing a second force of a second magnitude to the stage using a secondary actuator. The first force is arranged to cause the stage to translate along a first axis. The secondary actuator is also arranged to cause the stage to translate along the first axis, and has a relatively high positioning bandwidth. The first force is arranged to enable the stage to be relatively coarsely positioned and the second force is arranged to enable the stage to be relatively finely positioned. In one embodiment, the secondary actuator is one of a voice coil motor and a piezoelectric motor.
公开/授权文献
信息查询