发明授权
US07350404B2 Scanning type probe microscope and probe moving control method therefor
失效
扫描型探针显微镜及探头移动控制方法
- 专利标题: Scanning type probe microscope and probe moving control method therefor
- 专利标题(中): 扫描型探针显微镜及探头移动控制方法
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申请号: US10569373申请日: 2004-08-27
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公开(公告)号: US07350404B2公开(公告)日: 2008-04-01
- 发明人: Tooru Kurenuma , Hiroaki Yanagimoto , Hiroshi Kuroda , Yasushi Minomoto , Shigeru Miwa , Ken Murayama , Yukio Kenbou , Yuuichi Kunitomo , Takenori Hiroki , Yoshiyuki Nagano , Takafumi Morimoto
- 申请人: Tooru Kurenuma , Hiroaki Yanagimoto , Hiroshi Kuroda , Yasushi Minomoto , Shigeru Miwa , Ken Murayama , Yukio Kenbou , Yuuichi Kunitomo , Takenori Hiroki , Yoshiyuki Nagano , Takafumi Morimoto
- 申请人地址: JP Tokyo
- 专利权人: Hitachi Kenki Fine Tech Co., Ltd.
- 当前专利权人: Hitachi Kenki Fine Tech Co., Ltd.
- 当前专利权人地址: JP Tokyo
- 代理机构: Mattingly, Stanger, Malur & Brundidge, PC
- 优先权: JP2003-302991 20030827
- 国际申请: PCT/JP2004/012341 WO 20040827
- 国际公布: WO2005/022124 WO 20050310
- 主分类号: G21K7/00
- IPC分类号: G21K7/00 ; G01B5/18
摘要:
The probe tip movement control method of the scanning probe microscope is used for a scanning probe microscope provided with a cantilever 21 having a probe tip 20 facing a sample 12. The atomic force occurring between the probe tip and sample is measured when the probe tip scans the surface of the sample. X-, Y-, and Z-fine movement mechanisms 23, 29, and 30 are used to relatively change the positions of the probe tip and sample. It is possible to maintain a high measurement accuracy and enable scan movement of a probe tip on a sample surface by simple control when measuring a part having a gradient in measurement of an uneven shape on a sample surface.
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