公开(公告)号：US07350404B2

公开(公告)日：2008-04-01

申请号：US10569373

申请日：2004-08-27

申请人： Tooru Kurenuma ,  Hiroaki Yanagimoto ,  Hiroshi Kuroda ,  Yasushi Minomoto ,  Shigeru Miwa ,  Ken Murayama ,  Yukio Kenbou ,  Yuuichi Kunitomo ,  Takenori Hiroki ,  Yoshiyuki Nagano ,  Takafumi Morimoto

发明人： Tooru Kurenuma ,  Hiroaki Yanagimoto ,  Hiroshi Kuroda ,  Yasushi Minomoto ,  Shigeru Miwa ,  Ken Murayama ,  Yukio Kenbou ,  Yuuichi Kunitomo ,  Takenori Hiroki ,  Yoshiyuki Nagano ,  Takafumi Morimoto

IPC分类号： G21K7/00 ,  G01B5/18

CPC分类号： G01Q10/06 ,  G01Q30/06 ,  Y10T29/49828

摘要： The probe tip movement control method of the scanning probe microscope is used for a scanning probe microscope provided with a cantilever 21 having a probe tip 20 facing a sample 12. The atomic force occurring between the probe tip and sample is measured when the probe tip scans the surface of the sample. X-, Y-, and Z-fine movement mechanisms 23, 29, and 30 are used to relatively change the positions of the probe tip and sample. It is possible to maintain a high measurement accuracy and enable scan movement of a probe tip on a sample surface by simple control when measuring a part having a gradient in measurement of an uneven shape on a sample surface.

摘要翻译： 扫描探针显微镜的探针头移动控制方法用于具有面向样品12的探针尖端20的悬臂21的扫描探针显微镜。 当探针尖端扫描样品的表面时，测量探针尖端和样品之间发生的原子力。 X，Y和Z精细运动机构23,29和30用于相对改变探针尖端和样品的位置。 通过简单的控制，可以在测量样品表面上具有不均匀形状的测量梯度的部分时，保持高测量精度并且能够使探针尖端在样品表面上进行扫描运动。

公开(公告)号：US20050012936A1

公开(公告)日：2005-01-20

申请号：US10893364

申请日：2004-07-19

申请人： Ken Murayama ,  Yukio Kenbou ,  Yuuichi Kunitomo ,  Takenori Hiroki ,  Yoshiyuki Nagano ,  Takafumi Morimoto ,  Tooru Kurenuma ,  Hiroaki Yanagimoto ,  Hiroshi Kuroda ,  Shigeru Miwa

发明人： Ken Murayama ,  Yukio Kenbou ,  Yuuichi Kunitomo ,  Takenori Hiroki ,  Yoshiyuki Nagano ,  Takafumi Morimoto ,  Tooru Kurenuma ,  Hiroaki Yanagimoto ,  Hiroshi Kuroda ,  Shigeru Miwa

IPC分类号： G01B21/30 ,  G01B11/24 ,  G01B11/30 ,  G01Q10/04 ,  G01Q20/02 ,  G01Q30/02 ,  G01Q30/04 ,  G01Q30/20 ,  G01Q60/24 ,  H01L21/66

CPC分类号： G01Q20/02 ,  G01Q30/06 ,  G01Q70/04

摘要： A scanning probe microscope has a cantilever with a probe facing a sample and a measurement section for measuring a physical quantity occurring between the probe and the sample when the probe scans a surface of the sample, holding the physical quantity constant to measure the surface of the sample. The above microscope further has a probe tilt mechanism, an optical microscope etc. for detecting a position of the probe when the probe is tilted, and a control section for setting the probe in a first tilt posture and second tilt posture, measuring a surface of the sample by the measurement section at each tilt posture, detecting the position of the probe at least at the second tilt posture by the optical microscope etc., and making a measurement location at the second tilt posture match with a measurement location at the first tilt posture for measurement.

摘要翻译： 扫描探针显微镜具有悬臂，探针面向样品和测量部分，用于测量探头和样品之间发生的物理量，当探针扫描样品的表面时，保持物理量常数以测量样品的表面 样品。 上述显微镜还具有探针倾斜机构，光学显微镜等，用于在探头倾斜时检测探头的位置;以及控制部，用于将探针设置在第一倾斜姿势和第二倾斜姿势中， 通过测量部分在每个倾斜姿势下的样本，至少通过光学显微镜等检测第二倾斜姿势的探测器的位置，并且使第二倾斜姿势的测量位置与第一倾斜处的测量位置匹配 测量姿势。

公开(公告)号：US07333191B2

公开(公告)日：2008-02-19

申请号：US10893364

申请日：2004-07-19

申请人： Ken Murayama ,  Yukio Kenbou ,  Yuuichi Kunitomo ,  Takenori Hiroki ,  Yoshiyuki Nagano ,  Takafumi Morimoto ,  Tooru Kurenuma ,  Hiroaki Yanagimoto ,  Hiroshi Kuroda ,  Shigeru Miwa

发明人： Ken Murayama ,  Yukio Kenbou ,  Yuuichi Kunitomo ,  Takenori Hiroki ,  Yoshiyuki Nagano ,  Takafumi Morimoto ,  Tooru Kurenuma ,  Hiroaki Yanagimoto ,  Hiroshi Kuroda ,  Shigeru Miwa

IPC分类号： G01B1/00

CPC分类号： G01Q20/02 ,  G01Q30/06 ,  G01Q70/04

摘要： A scanning probe microscope has a cantilever with a probe facing a sample and a measurement section for measuring a physical quantity occurring between the probe and the sample when the probe scans a surface of the sample, holding the physical quantity constant to measure the surface of the sample. The above microscope further has a probe tilt mechanism, an optical microscope etc. for detecting a position of the probe when the probe is tilted, and a control section for setting the probe in a first tilt posture and second tilt posture, measuring a surface of the sample by the measurement section at each tilt posture, detecting the position of the probe at least at the second tilt posture by the optical microscope etc., and making a measurement location at the second tilt posture match with a measurement location at the first tilt posture for measurement.

摘要翻译： 扫描探针显微镜具有悬臂，探针面向样品和测量部分，用于测量探头和样品之间发生的物理量，当探针扫描样品的表面时，保持物理量常数以测量样品的表面 样品。 上述显微镜还具有探针倾斜机构，光学显微镜等，用于在探头倾斜时检测探头的位置;以及控制部，用于将探针设置在第一倾斜姿势和第二倾斜姿势中， 通过测量部分在每个倾斜姿势下的样本，至少通过光学显微镜等检测第二倾斜姿势的探测器的位置，并且使第二倾斜姿势的测量位置与第一倾斜处的测量位置匹配 测量姿势。

公开(公告)号：US07388199B2

公开(公告)日：2008-06-17

申请号：US10570198

申请日：2004-09-03

申请人： Takafumi Morimoto ,  Tooru Shinaki ,  Yoshiyuki Nag'No ,  Yukio Kenbou ,  Yuuichi Kunitomo ,  Takenori Hiroki ,  Tooru Kurenuma ,  Hiroaki Yanagimoto ,  Hiroshi Kuroda ,  Shigeru Miwa ,  Ken Murayama ,  Mitsuo Hayashibara ,  Kishio Hidaka ,  Tadashi Fujieda

发明人： Takafumi Morimoto ,  Tooru Shinaki ,  Yoshiyuki Nag'No ,  Yukio Kenbou ,  Yuuichi Kunitomo ,  Takenori Hiroki ,  Tooru Kurenuma ,  Hiroaki Yanagimoto ,  Hiroshi Kuroda ,  Shigeru Miwa ,  Ken Murayama ,  Mitsuo Hayashibara ,  Kishio Hidaka ,  Tadashi Fujieda

IPC分类号： G21K7/00

CPC分类号： G01Q70/12

摘要： A probe is made by attaching a carbon nanotube 12 to a mounting base end 13, which eliminates the effects of a carbon contamination film, to increase the bonding strength, increase the conductivity of the probe, and strengthen the bonding performance thereof by coating the entire circumference of the nanotube and the base with a coating film, rather than coating just one side. The work of mounting the carbon nanotube and mounting base end are performed under observation by a microscope. Further, the carbon contamination film 14 formed by an electron microscope is stripped off at a stage before bonding by the coating film.

摘要翻译： 通过将碳纳米管12附着到安装基端13上，从而消除碳污染膜的影响，提高接合强度，提高探针的导电性，并通过涂覆全部 纳米管的周长和基底与涂膜，而不是仅涂覆一面。 在显微镜观察下进行安装碳纳米管和安装基端的工作。 此外，通过电子显微镜形成的碳污染膜14在通过涂膜粘合之前的阶段被剥离。

公开(公告)号：US20070180889A1

公开(公告)日：2007-08-09

申请号：US10565509

申请日：2004-03-22

申请人： Ken Murayama ,  Yokio Kenbou ,  Yuuichi Kunitomo ,  Takenori Hiroki ,  Yoshiyuki Nagano ,  Takafumi Morimoto ,  Tooru Kurenuma ,  Hiroaki Yanagimoto ,  Hiroshi Kuroda ,  Shigeru Miwa ,  Takashi Furutani

发明人： Ken Murayama ,  Yokio Kenbou ,  Yuuichi Kunitomo ,  Takenori Hiroki ,  Yoshiyuki Nagano ,  Takafumi Morimoto ,  Tooru Kurenuma ,  Hiroaki Yanagimoto ,  Hiroshi Kuroda ,  Shigeru Miwa ,  Takashi Furutani

IPC分类号： G12B21/00 ,  G01N13/10

CPC分类号： G01Q10/06 ,  G01Q30/06 ,  G01Q70/02

摘要： A probe replacement method for a scanning probe microscope for measuring the surface of a sample, having a cantilever (21) having a probe (20), and a measurement unit for measuring a physical quantity between the probe and sample. The scanning probe microscope is provided with a cantilever mount (22), a cantilever cassette (30), an XY stage (14) and Z stage (15) for moving the cantilever cassette, and an optical microscope (18). In a first step, a cantilever is selected from the cantilever cassette and is mounted on the cantilever mount. In a second step, an optical microscope is moved and the mounted cantilever is set in a prescribed position in the field of view after the cantilever is mounted in the scanning probe microscope. In the second step, a step is provided for moving the optical microscope side or the cantilever side and performing positional adjustment.

摘要翻译： 一种用于测量具有具有探针（20）的悬臂（21）的样品表面的扫描探针显微镜的探针替换方法和用于测量探针和样品之间的物理量的测量单元。 扫描探针显微镜具有用于移动悬臂盒的悬臂安装座（22），悬臂盒（30），XY台（14）和Z台（15）以及光学显微镜（18）。 在第一步中，从悬臂盒中选择悬臂，并安装在悬臂安装座上。 在第二步骤中，移动光学显微镜，并且在将悬臂安装在扫描探针显微镜中之后，将安装的悬臂设置在视野中的规定位置。 在第二步骤中，提供移动光学显微镜侧或悬臂侧并执行位置调整的步骤。