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1.
公开(公告)号:US07350404B2
公开(公告)日:2008-04-01
申请号:US10569373
申请日:2004-08-27
申请人: Tooru Kurenuma , Hiroaki Yanagimoto , Hiroshi Kuroda , Yasushi Minomoto , Shigeru Miwa , Ken Murayama , Yukio Kenbou , Yuuichi Kunitomo , Takenori Hiroki , Yoshiyuki Nagano , Takafumi Morimoto
发明人: Tooru Kurenuma , Hiroaki Yanagimoto , Hiroshi Kuroda , Yasushi Minomoto , Shigeru Miwa , Ken Murayama , Yukio Kenbou , Yuuichi Kunitomo , Takenori Hiroki , Yoshiyuki Nagano , Takafumi Morimoto
CPC分类号: G01Q10/06 , G01Q30/06 , Y10T29/49828
摘要: The probe tip movement control method of the scanning probe microscope is used for a scanning probe microscope provided with a cantilever 21 having a probe tip 20 facing a sample 12. The atomic force occurring between the probe tip and sample is measured when the probe tip scans the surface of the sample. X-, Y-, and Z-fine movement mechanisms 23, 29, and 30 are used to relatively change the positions of the probe tip and sample. It is possible to maintain a high measurement accuracy and enable scan movement of a probe tip on a sample surface by simple control when measuring a part having a gradient in measurement of an uneven shape on a sample surface.
摘要翻译: 扫描探针显微镜的探针头移动控制方法用于具有面向样品12的探针尖端20的悬臂21的扫描探针显微镜。 当探针尖端扫描样品的表面时,测量探针尖端和样品之间发生的原子力。 X,Y和Z精细运动机构23,29和30用于相对改变探针尖端和样品的位置。 通过简单的控制,可以在测量样品表面上具有不均匀形状的测量梯度的部分时,保持高测量精度并且能够使探针尖端在样品表面上进行扫描运动。
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公开(公告)号:US20050012936A1
公开(公告)日:2005-01-20
申请号:US10893364
申请日:2004-07-19
申请人: Ken Murayama , Yukio Kenbou , Yuuichi Kunitomo , Takenori Hiroki , Yoshiyuki Nagano , Takafumi Morimoto , Tooru Kurenuma , Hiroaki Yanagimoto , Hiroshi Kuroda , Shigeru Miwa
发明人: Ken Murayama , Yukio Kenbou , Yuuichi Kunitomo , Takenori Hiroki , Yoshiyuki Nagano , Takafumi Morimoto , Tooru Kurenuma , Hiroaki Yanagimoto , Hiroshi Kuroda , Shigeru Miwa
IPC分类号: G01B21/30 , G01B11/24 , G01B11/30 , G01Q10/04 , G01Q20/02 , G01Q30/02 , G01Q30/04 , G01Q30/20 , G01Q60/24 , H01L21/66
摘要: A scanning probe microscope has a cantilever with a probe facing a sample and a measurement section for measuring a physical quantity occurring between the probe and the sample when the probe scans a surface of the sample, holding the physical quantity constant to measure the surface of the sample. The above microscope further has a probe tilt mechanism, an optical microscope etc. for detecting a position of the probe when the probe is tilted, and a control section for setting the probe in a first tilt posture and second tilt posture, measuring a surface of the sample by the measurement section at each tilt posture, detecting the position of the probe at least at the second tilt posture by the optical microscope etc., and making a measurement location at the second tilt posture match with a measurement location at the first tilt posture for measurement.
摘要翻译: 扫描探针显微镜具有悬臂,探针面向样品和测量部分,用于测量探头和样品之间发生的物理量,当探针扫描样品的表面时,保持物理量常数以测量样品的表面 样品。 上述显微镜还具有探针倾斜机构,光学显微镜等,用于在探头倾斜时检测探头的位置;以及控制部,用于将探针设置在第一倾斜姿势和第二倾斜姿势中, 通过测量部分在每个倾斜姿势下的样本,至少通过光学显微镜等检测第二倾斜姿势的探测器的位置,并且使第二倾斜姿势的测量位置与第一倾斜处的测量位置匹配 测量姿势。
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3.
公开(公告)号:US20060284083A1
公开(公告)日:2006-12-21
申请号:US10569373
申请日:2004-08-27
申请人: Tooru Kurenuma , Hiroaki Yanagimoto , Hiroshi Kuroda , Yasushi Minomoto , Shigeru Miwa , Ken Murayama , Yukio Kenbou , Yuuichi Yuuichi , Takenori Hiroki , Yoshiyuki Nagano , Takafumi Morimoto
发明人: Tooru Kurenuma , Hiroaki Yanagimoto , Hiroshi Kuroda , Yasushi Minomoto , Shigeru Miwa , Ken Murayama , Yukio Kenbou , Yuuichi Yuuichi , Takenori Hiroki , Yoshiyuki Nagano , Takafumi Morimoto
IPC分类号: G21K7/00
CPC分类号: G01Q10/06 , G01Q30/06 , Y10T29/49828
摘要: The probe tip movement control method of the scanning probe microscope is used for a scanning probe microscope provided with a cantilever 21 having a probe tip 20 facing a sample 12. The atomic force occurring between the probe tip and sample is measured when the probe tip scans the surface of the sample. X-, Y-, and Z-fine movement mechanisms 23, 29, and 30 are used to relatively change the positions of the probe tip and sample. It is possible to maintain a high measurement accuracy and enable scan movement of a probe tip on a sample surface by simple control when measuring a part having a gradient in measurement of an uneven shape on a sample surface.
摘要翻译: 扫描探针显微镜的探针头移动控制方法用于具有面向样品12的探针尖端20的悬臂21的扫描探针显微镜。 当探针尖端扫描样品的表面时,测量探针尖端和样品之间发生的原子力。 X,Y和Z精细运动机构23,29和30用于相对改变探针尖端和样品的位置。 通过简单的控制,可以在测量样品表面上具有不均匀形状的测量梯度的部分时,保持高测量精度并且能够使探针尖端在样品表面上进行扫描运动。
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公开(公告)号:US07333191B2
公开(公告)日:2008-02-19
申请号:US10893364
申请日:2004-07-19
申请人: Ken Murayama , Yukio Kenbou , Yuuichi Kunitomo , Takenori Hiroki , Yoshiyuki Nagano , Takafumi Morimoto , Tooru Kurenuma , Hiroaki Yanagimoto , Hiroshi Kuroda , Shigeru Miwa
发明人: Ken Murayama , Yukio Kenbou , Yuuichi Kunitomo , Takenori Hiroki , Yoshiyuki Nagano , Takafumi Morimoto , Tooru Kurenuma , Hiroaki Yanagimoto , Hiroshi Kuroda , Shigeru Miwa
IPC分类号: G01B1/00
摘要: A scanning probe microscope has a cantilever with a probe facing a sample and a measurement section for measuring a physical quantity occurring between the probe and the sample when the probe scans a surface of the sample, holding the physical quantity constant to measure the surface of the sample. The above microscope further has a probe tilt mechanism, an optical microscope etc. for detecting a position of the probe when the probe is tilted, and a control section for setting the probe in a first tilt posture and second tilt posture, measuring a surface of the sample by the measurement section at each tilt posture, detecting the position of the probe at least at the second tilt posture by the optical microscope etc., and making a measurement location at the second tilt posture match with a measurement location at the first tilt posture for measurement.
摘要翻译: 扫描探针显微镜具有悬臂,探针面向样品和测量部分,用于测量探头和样品之间发生的物理量,当探针扫描样品的表面时,保持物理量常数以测量样品的表面 样品。 上述显微镜还具有探针倾斜机构,光学显微镜等,用于在探头倾斜时检测探头的位置;以及控制部,用于将探针设置在第一倾斜姿势和第二倾斜姿势中, 通过测量部分在每个倾斜姿势下的样本,至少通过光学显微镜等检测第二倾斜姿势的探测器的位置,并且使第二倾斜姿势的测量位置与第一倾斜处的测量位置匹配 测量姿势。
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公开(公告)号:US07388199B2
公开(公告)日:2008-06-17
申请号:US10570198
申请日:2004-09-03
申请人: Takafumi Morimoto , Tooru Shinaki , Yoshiyuki Nag'No , Yukio Kenbou , Yuuichi Kunitomo , Takenori Hiroki , Tooru Kurenuma , Hiroaki Yanagimoto , Hiroshi Kuroda , Shigeru Miwa , Ken Murayama , Mitsuo Hayashibara , Kishio Hidaka , Tadashi Fujieda
发明人: Takafumi Morimoto , Tooru Shinaki , Yoshiyuki Nag'No , Yukio Kenbou , Yuuichi Kunitomo , Takenori Hiroki , Tooru Kurenuma , Hiroaki Yanagimoto , Hiroshi Kuroda , Shigeru Miwa , Ken Murayama , Mitsuo Hayashibara , Kishio Hidaka , Tadashi Fujieda
IPC分类号: G21K7/00
CPC分类号: G01Q70/12
摘要: A probe is made by attaching a carbon nanotube 12 to a mounting base end 13, which eliminates the effects of a carbon contamination film, to increase the bonding strength, increase the conductivity of the probe, and strengthen the bonding performance thereof by coating the entire circumference of the nanotube and the base with a coating film, rather than coating just one side. The work of mounting the carbon nanotube and mounting base end are performed under observation by a microscope. Further, the carbon contamination film 14 formed by an electron microscope is stripped off at a stage before bonding by the coating film.
摘要翻译: 通过将碳纳米管12附着到安装基端13上,从而消除碳污染膜的影响,提高接合强度,提高探针的导电性,并通过涂覆全部 纳米管的周长和基底与涂膜,而不是仅涂覆一面。 在显微镜观察下进行安装碳纳米管和安装基端的工作。 此外,通过电子显微镜形成的碳污染膜14在通过涂膜粘合之前的阶段被剥离。
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公开(公告)号:US20070180889A1
公开(公告)日:2007-08-09
申请号:US10565509
申请日:2004-03-22
申请人: Ken Murayama , Yokio Kenbou , Yuuichi Kunitomo , Takenori Hiroki , Yoshiyuki Nagano , Takafumi Morimoto , Tooru Kurenuma , Hiroaki Yanagimoto , Hiroshi Kuroda , Shigeru Miwa , Takashi Furutani
发明人: Ken Murayama , Yokio Kenbou , Yuuichi Kunitomo , Takenori Hiroki , Yoshiyuki Nagano , Takafumi Morimoto , Tooru Kurenuma , Hiroaki Yanagimoto , Hiroshi Kuroda , Shigeru Miwa , Takashi Furutani
摘要: A probe replacement method for a scanning probe microscope for measuring the surface of a sample, having a cantilever (21) having a probe (20), and a measurement unit for measuring a physical quantity between the probe and sample. The scanning probe microscope is provided with a cantilever mount (22), a cantilever cassette (30), an XY stage (14) and Z stage (15) for moving the cantilever cassette, and an optical microscope (18). In a first step, a cantilever is selected from the cantilever cassette and is mounted on the cantilever mount. In a second step, an optical microscope is moved and the mounted cantilever is set in a prescribed position in the field of view after the cantilever is mounted in the scanning probe microscope. In the second step, a step is provided for moving the optical microscope side or the cantilever side and performing positional adjustment.
摘要翻译: 一种用于测量具有具有探针(20)的悬臂(21)的样品表面的扫描探针显微镜的探针替换方法和用于测量探针和样品之间的物理量的测量单元。 扫描探针显微镜具有用于移动悬臂盒的悬臂安装座(22),悬臂盒(30),XY台(14)和Z台(15)以及光学显微镜(18)。 在第一步中,从悬臂盒中选择悬臂,并安装在悬臂安装座上。 在第二步骤中,移动光学显微镜,并且在将悬臂安装在扫描探针显微镜中之后,将安装的悬臂设置在视野中的规定位置。 在第二步骤中,提供移动光学显微镜侧或悬臂侧并执行位置调整的步骤。
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公开(公告)号:US20060284084A1
公开(公告)日:2006-12-21
申请号:US10570198
申请日:2004-09-03
申请人: Takafumi Morimoto , Tooru Seinaki , Yoshiyuki Nag-No , Yukio Kenbou , Yuuichi Xunitomo , Takenori Hiroki , Tooru Kurenuma , Hiroaki Yanagimoto , Hiroshi Kuroda , Shigeru Miwa , Ken Murayama , Mitsuo Hayashirara , Kishio Hidaka , Tadashi Fujieda
发明人: Takafumi Morimoto , Tooru Seinaki , Yoshiyuki Nag-No , Yukio Kenbou , Yuuichi Xunitomo , Takenori Hiroki , Tooru Kurenuma , Hiroaki Yanagimoto , Hiroshi Kuroda , Shigeru Miwa , Ken Murayama , Mitsuo Hayashirara , Kishio Hidaka , Tadashi Fujieda
IPC分类号: G21K7/00
CPC分类号: G01Q70/12
摘要: A method of producing a probe by attaching a carbon nanotube etc. to a mounting base end and bonding it there using a carbon film etc., which method of producing a probe eliminates the effects of a carbon contamination film to increase the bonding strength, increases the conductivity of the probe, and strengthens the bonding performance by coating the entire circumference rather than coating one side, the probe, and a scanning probe microscope are provided. The method of producing a probe is a method of producing a probe comprised of a carbon nanotube 12, a mounting base ends 13 holding this carbon nanotube, and a coating film 17 bonding the carbon nanotube to a mounting base, comprising performing the mounting work of the carbon nanotube and mounting base end under observation by a microscope and stripping off the carbon contamination film 14 formed by an electron microscope at a stage before bonding by the coating film.
摘要翻译: 通过使用碳膜等将碳纳米管等附接到安装基端并在其上进行接合来制造探针的方法,制造探针的方法消除了碳污染膜的作用,增加了接合强度,增加了 提供探针的导电性,并且通过涂覆整个周边而不是涂覆一侧,探针和扫描探针显微镜来增强粘合性能。 制造探针的方法是制造由碳纳米管12,保持该碳纳米管的安装基端13和将碳纳米管粘合到安装基底的涂膜17的探针的制造方法,其特征在于, 碳纳米管和安装基端通过显微镜观察,并在通过涂膜粘合之前的阶段剥离由电子显微镜形成的碳污染膜14。
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8.
公开(公告)号:US6112593A
公开(公告)日:2000-09-05
申请号:US188372
申请日:1998-11-10
申请人: Shigenori Aoki , Tohru Miyata , Seigo Kikuchi , Shigeru Miwa , Hajime Mizunoya , Takenori Hiroki
发明人: Shigenori Aoki , Tohru Miyata , Seigo Kikuchi , Shigeru Miwa , Hajime Mizunoya , Takenori Hiroki
CPC分类号: G01N29/22 , G01N29/0609
摘要: A non-destructive inspection device has an inspection unit body and a support casing which is used as a set-up type device by combining the inspection unit body and the support casing in ordinary inspection, and is used as a portable type device by separating them for special inspection situations involving narrow places or high places. The support casing can be freely combined to or separated from the inspection unit body. When combining the two components, the non-destructive inspection device can carry out the inspection based on a stable set-up mode in the same way as conventional devices. When separated, the inspection unit body is used as a portable device.
摘要翻译: 非破坏性检查装置具有检查单元主体和支撑壳体,其通过在普通检查中组合检查单元主体和支撑壳体而用作安装型装置,并且通过分离它们用作便携式装置 适用于狭窄场所或场所的特殊情况。 支撑壳体可以自由地组合到检查单元主体或从检查单元主体分离。 当组合两个部件时,非破坏性检查装置可以以与常规装置相同的方式基于稳定的设置模式进行检查。 当分离时,检查单元主体用作便携式设备。
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公开(公告)号:US4487686A
公开(公告)日:1984-12-11
申请号:US583182
申请日:1984-02-24
申请人: Shimpei Gomi , Tomio Arai , Tomomitsu Takeuchi , Shigeru Miwa , Toru Takatsuka , Ryuzo Watari
发明人: Shimpei Gomi , Tomio Arai , Tomomitsu Takeuchi , Shigeru Miwa , Toru Takatsuka , Ryuzo Watari
CPC分类号: C10G51/023
摘要: A heavy hydrocarbon feed stock is, after being heat-treated in a first cracking zone, is introduced into a second thermal cracking zone for obtaining a thermally cracked product and a pitch product. The second cracking zone has a plurality of cracking reactors which are connected in series, through which is successively passed the treated feed stock and to each of which is supplied a gaseous heat transfer medium to maintain the liquid phase therein at a temperature sufficient for effecting the thermal cracking and to strip the resulting distillable, cracked components from the liquid phase. The thermal cracking temperature in one reactor is so controlled as to become higher than that in its adjacent upstream-side reactor. The distillable, cracked components in respective reactors are removed overhead therefrom and separated into a heavy fraction and a light fraction, while the liquid phase in the downstream-end reactor is discharged therefrom for recovery as the pitch product. The light fraction is recovered as a light product oil, while the heavy fraction is fed to a third thermal cracking zone for obtaining a tar-containing product which is recycled to at least one of the reactors of the second thermal cracking zone together with a naphthene base heavy hydrocarbon oil.
摘要翻译: 在第一裂解区热处理后,将重质烃原料引入第二热裂解区以获得热裂化产物和沥青产物。 第二裂解区具有多个串联连接的裂解反应器,通过该裂化反应器依次通过处理过的原料,并将其中的每一个供应气态传热介质,使其中的液相保持在足以实现 热裂解并从液相中剥离得到的可馏出的裂化组分。 一个反应器中的热裂解温度被控制得高于其相邻的上游侧反应器中的热裂解温度。 各反应器中的可蒸馏的裂化组分在其上从其上除去并分离成重馏分和轻馏分,而下游反应器中的液相从其排出,作为沥青产物进行回收。 将轻馏分作为轻质产物油回收,同时将重质馏分进料至第三热裂解区,以获得含焦油的产物,其与第二热裂解区的至少一个反应器一起再循环至环烷烃 基础重烃油。
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公开(公告)号:US06397681B1
公开(公告)日:2002-06-04
申请号:US09321120
申请日:1999-05-27
申请人: Hajime Mizunoya , Yoshio Akutsu , Shigenori Aoki , Shigeru Miwa
发明人: Hajime Mizunoya , Yoshio Akutsu , Shigenori Aoki , Shigeru Miwa
IPC分类号: G01N2904
CPC分类号: G01N29/0645 , G01N2291/02854 , G01N2291/0289
摘要: This portable ultrasonic detector has a moved distance instrument comprised of an encoder for detecting a moved amount and a counter for counting the moved amount signal outputted from the encoder, as a means for obtaining position information of an ultrasonic probe. When moving the ultrasonic probe on the surface of the object on the occasion of the inspection, the moved distance instrument measures the moved amount of the ultrasonic probe. The measured moved amount of the ultrasonic probe is sent to an arithmetic processing section of the device body. Also, the ultrasonic detector detects A-scope data when scanning the inspected object with the ultrasonic probe, and executes the predetermined processing by using the data. The ultrasonic detector combines the A-scope data and the moved distance data of the ultrasonic probe to make an inner scope image (B-scope image, etc). When repeatedly scanning the same spot of the object with the ultrasonic probe in order to make the B-scope image, etc. and display them on a display section, peaks of defect echo waves are memorized in piles, and further two defect images or more are displayed on the B-scope image. This ultrasonic detector is configured to draw a storage-type B-scope images. Thereby, defect images can be evaluated in detail and a defect position can be detected accurately.
摘要翻译: 该便携式超声波检测器具有移动距离仪器,其包括用于检测移动量的编码器和用于计数从编码器输出的移动量信号的计数器,作为用于获得超声波探头的位置信息的装置。 在检查时将物体表面移动超声波探头时,移动的距离仪器测量超声波探头的移动量。 将超声波探头的测量移动量发送到装置主体的运算处理部。 此外,超声波检测器在利用超声波探头扫描检查对象时检测A范围数据,并且通过使用该数据来执行预定处理。 超声波检测器将A范围数据与超声波探头的移动距离数据进行组合,形成内窥镜图像(B范围图像等)。 当使用超声波探头重复扫描物体的同一点以便制作B像镜图像等并将其显示在显示部分时,缺陷回波的峰值被记录在堆中,并且还有两个缺陷图像或更多 显示在B范围图像上。 该超声波检测器被配置为绘制存储型B范围图像。 因此,可以详细评估缺陷图像,并且可以准确地检测缺陷位置。
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