发明授权
- 专利标题： Susceptor pocket with beveled projection sidewall
- 专利标题（中）： 具有斜面突起侧壁的受体袋
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申请号： US10064451申请日： 2002-07-16
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公开(公告)号： US07381276B2公开(公告)日： 2008-06-03
- 发明人: Donna K. Johnson , Jim S. Nakos , Jean-Jacques H. Psaute , Bernard A. Roque, Jr.
- 申请人： Donna K. Johnson , Jim S. Nakos , Jean-Jacques H. Psaute , Bernard A. Roque, Jr.
- 申请人地址： US NY Armonk
- 专利权人： International Business Machines Corporation
- 当前专利权人： International Business Machines Corporation
- 当前专利权人地址： US NY Armonk
- 代理机构： Gibb & Rahman, LLC
- 代理商 Anthony Canale
- 主分类号： H01L21/00
- IPC分类号： H01L21/00 ; C23C16/00
摘要：
An apparatus for holding a semiconductor substrate comprises a plate having a pocket which holds the substrate, wherein the pocket comprises a lower surface and an inner edge. The inner edge comprises a plurality of members extending radially inward to reduce the area of contact between the inner edge and the substrate. The beveled edge is inclined so that there is an acute angle between the lower surface of the pocket and the beveled edge.
公开/授权文献
- US20040011293A1 Susceptor pocket with beveled projection sidewall 公开/授权日：2004-01-22
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