Method for heating a chemically amplified resist layer carried on a rotating substrate

Invention Grant

US07479463B2 Method for heating a chemically amplified resist layer carried on a rotating substrate 失效

Title translation: 用于加热承载在旋转衬底上的化学放大抗蚀剂层的方法

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Patent Title: Method for heating a chemically amplified resist layer carried on a rotating substrate
Patent Title (中): 用于加热承载在旋转衬底上的化学放大抗蚀剂层的方法
Application No.: US11684154

Application Date: 2007-03-09
Publication No.: US07479463B2

Publication Date: 2009-01-20
Inventor: John Kulp , Michael Carcasi , Merritt Funk
Applicant: John Kulp , Michael Carcasi , Merritt Funk
Applicant Address: JP Tokyo
Assignee: Tokyo Electron Limited
Current Assignee: Tokyo Electron Limited
Current Assignee Address: JP Tokyo
Agency: Wood, Herron & Evans LLP
Main IPC: H01L21/312
IPC: H01L21/312

Method for heating a chemically amplified resist layer carried on a rotating substrate

Abstract:

Embodiments of an apparatus and methods for heating a substrate and a sacrificial layer are generally described herein. Other embodiments may be described and claimed.

Abstract(Chinese):

本文通常描述用于加热衬底和牺牲层的装置和方法的实施例。可以描述和要求保护其他实施例。

Public/Granted literature

US20080220340A1 APPARATUS AND METHOD FOR HEATING A LAYER CARRIED ON A ROTATING SUBSTRATE Public/Granted day:2008-09-11

Information query

Espacenet

IPC分类:

H	电学
H01	基本电气元件
H01L	半导体器件；其他类目中不包括的电固体器件（使用半导体器件的测量入G01；一般电阻器入H01C；磁体、电感器、变压器入H01F；一般电容器入H01G；电解型器件入H01G9/00；电池组、蓄电池入H01M；波导管、谐振器或波导型线路入H01P；线路连接器、汇流器入H01R；受激发射器件入H01S；机电谐振器入H03H；扬声器、送话器、留声机拾音器或类似的声机电传感器入H04R；一般电光源入H05B；印刷电路、混合电路、电设备的外壳或结构零部件、电气元件的组件的制造入H05K；在具有特殊应用的电路中使用的半导体器件见应用相关的小类）
H01L21/00	专门适用于制造或处理半导体或固体器件或其部件的方法或设备
H01L21/02	.半导体器件或其部件的制造或处理
H01L21/04	..至少具有一个跃变势垒或表面势垒的器件，例如PN结、耗尽层、载体集结层
H01L21/18	...器件有由周期表Ⅳ族元素或含有/不含有杂质的AⅢBⅤ族化合物构成的半导体，如掺杂材料
H01L21/30	....用H01L21/20至H01L21/26各组不包含的方法或设备处理半导体材料的（在半导体材料上制作电极的入H01L21/28）
H01L21/31	.....在半导体材料上形成绝缘层的，例如用于掩膜的或应用光刻技术的（密封层入H01L21/56）；以及这些层的后处理；这些层的材料的选择
H01L21/312	......有机层，例如光刻胶（H01L21/3105、H01L21/32优先）