发明授权
- 专利标题: Gas delivery system for semiconductor processing
- 专利标题(中): 用于半导体加工的气体输送系统
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申请号: US11552129申请日: 2006-10-23
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公开(公告)号: US07498268B2公开(公告)日: 2009-03-03
- 发明人: Sudhir Gondhalekar , Padmanabhan Krishnaraj , Tom K. Cho , Muhammad Rasheed , Hemant Mungekar , Thanh N. Pham , Zhong Qiang Hua
- 申请人: Sudhir Gondhalekar , Padmanabhan Krishnaraj , Tom K. Cho , Muhammad Rasheed , Hemant Mungekar , Thanh N. Pham , Zhong Qiang Hua
- 申请人地址: US CA Santa Clara
- 专利权人: Applied Materials, Inc.
- 当前专利权人: Applied Materials, Inc.
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Townsend and Townsend and Crew
- 主分类号: H01L21/461
- IPC分类号: H01L21/461 ; H01L21/302
摘要:
The present invention is directed to improving defect performance in semiconductor processing systems. In specific embodiments, an apparatus for processing semiconductor substrates comprises a chamber defining a processing region therein, and a substrate support disposed in the chamber to support a semiconductor substrate. At least one nozzle extends into the chamber to introduce a process gas into the chamber through a nozzle opening. The apparatus comprises at least one heat shield, each of which is disposed around at least a portion of one of the at least one nozzle. The heat shield has an extension which projects distally of the nozzle opening of the nozzle and which includes a heat shield opening for the process gas to flow therethrough from the nozzle opening. The heat shield decreases the temperature of nozzle in the processing chamber for introducing process gases therein to reduce particles.
公开/授权文献
- US20070048446A1 GAS DELIVERY SYSTEM FOR SEMICONDUCTOR PROCESSING 公开/授权日:2007-03-01