发明授权
- 专利标题: Method of manufacturing nitride-based semiconductor light emitting device
- 专利标题(中): 氮化物系半导体发光元件的制造方法
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申请号: US11690504申请日: 2007-03-23
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公开(公告)号: US07531465B2公开(公告)日: 2009-05-12
- 发明人: Jae-hee Cho , Cheol-soo Sone , Dong-yu Kim , Hyun-gi Hong , Seok-soon Kim
- 申请人: Jae-hee Cho , Cheol-soo Sone , Dong-yu Kim , Hyun-gi Hong , Seok-soon Kim
- 申请人地址: KR
- 专利权人: Samsung Electro-Mechanics Co., Ltd.
- 当前专利权人: Samsung Electro-Mechanics Co., Ltd.
- 当前专利权人地址: KR
- 代理机构: Cantor Colburn LLP
- 优先权: KR10-2006-0045112 20060519
- 主分类号: H01L21/31
- IPC分类号: H01L21/31
摘要:
Provided is a method of manufacturing a nitride-based semiconductor light-emitting device having an improved structure in which optical extraction efficiency is improved. The method of manufacturing a nitride-based semiconductor light-emitting device including an n-doped semiconductor layer, an active layer, a p-doped semiconductor layer, an n-electrode and a p-electrode includes: forming an azobenzene-functionalized polymer film on a base layer by selecting one layer from the group consisting of the n-doped semiconductor layer, the p-doped semiconductor layer, the n-electrode and the p-electrode as the base layer; forming surface relief gratings of a micro-pattern caused by a photophysical mass transport property of azobenzene-functionalized polymer by irradiating interference laser beams onto the azobenzene-functionalized polymer film; forming a photonic crystal layer using a metal oxide on a recessed gap of the azobenzene-functionalized polymer film, and removing the azobenzene-functionalized polymer film.
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