发明授权
US07551287B2 Actuator for micro-electromechanical system fabry-perot filter 有权
微机电系统执行机构法布里 - 珀罗过滤器

Actuator for micro-electromechanical system fabry-perot filter
摘要:
According to one embodiment, a micro-electrical mechanical system apparatus includes a bi-stable actuator and at least one movable Fabry-Perot filter cavity mirror coupled to the bi-stable actuator. The bi-stable actuator may be associated with a first latched position and a second latched position and may comprise, for example, a thermal device, an electrostatic device (e.g., a parallel plate or comb drive), or a magnetic device. According to some embodiments, a relationship between a voltage applied to an actuator of a Fabry-Perot filter and an amount of displacement associated with a movable mirror is substantially linear.
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