发明授权
- 专利标题: Actuator for micro-electromechanical system fabry-perot filter
- 专利标题(中): 微机电系统执行机构法布里 - 珀罗过滤器
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申请号: US11502186申请日: 2006-08-10
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公开(公告)号: US07551287B2公开(公告)日: 2009-06-23
- 发明人: Anis Zribi , Glenn S. Claydon , David C. Hays , Stacey Kennerly , Long Que , Shankar Chandrasekaran , Shivappa Goravar , Ayan Banerjec
- 申请人: Anis Zribi , Glenn S. Claydon , David C. Hays , Stacey Kennerly , Long Que , Shankar Chandrasekaran , Shivappa Goravar , Ayan Banerjec
- 申请人地址: US CA Newark
- 专利权人: GE Homeland Protection, Inc.
- 当前专利权人: GE Homeland Protection, Inc.
- 当前专利权人地址: US CA Newark
- 代理商 Joseph J. Christian
- 主分类号: G01B9/02
- IPC分类号: G01B9/02 ; G01J3/45 ; G01N21/00
摘要:
According to one embodiment, a micro-electrical mechanical system apparatus includes a bi-stable actuator and at least one movable Fabry-Perot filter cavity mirror coupled to the bi-stable actuator. The bi-stable actuator may be associated with a first latched position and a second latched position and may comprise, for example, a thermal device, an electrostatic device (e.g., a parallel plate or comb drive), or a magnetic device. According to some embodiments, a relationship between a voltage applied to an actuator of a Fabry-Perot filter and an amount of displacement associated with a movable mirror is substantially linear.
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