Invention Grant
- Patent Title: Workpiece handling scan arm for ion implantation system
- Patent Title (中): 用于离子植入系统的工件处理扫描臂
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Application No.: US11840888Application Date: 2007-08-17
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Publication No.: US07560705B2Publication Date: 2009-07-14
- Inventor: Ari Eiriksson , Donovan Beckel , Robert Mitchell , Michel Pharand , Marvin LaFontaine , Ashwin Purohit , Steven Weed , Wayne Arseneault , Shantanu Pathak , Joseph Daniel Foley
- Applicant: Ari Eiriksson , Donovan Beckel , Robert Mitchell , Michel Pharand , Marvin LaFontaine , Ashwin Purohit , Steven Weed , Wayne Arseneault , Shantanu Pathak , Joseph Daniel Foley
- Applicant Address: US MA Beverly
- Assignee: Axcelis Technologies, Inc.
- Current Assignee: Axcelis Technologies, Inc.
- Current Assignee Address: US MA Beverly
- Agency: Eschweiler & Associates, LLC
- Main IPC: H01J37/317
- IPC: H01J37/317

Abstract:
An ion implantation apparatus, system, and method are provided for connecting and disconnecting a workpiece holder from a scan arm. A twist head is provided, wherein an electrostatic chuck is operable to be mounted, wherein one or more rotating and non-rotating members associated with one or more of the twist head and electrostatic chuck have one or more dynamic electrical and fluid rotary connections associated therewith. The electrostatic chuck is further operable to be removed from the twist head without disconnecting the one or more dynamic fluid seals.
Public/Granted literature
- US20080105836A1 WORKPIECE HANDLING SCAN ARM FOR ION IMPLANTATION SYSTEM Public/Granted day:2008-05-08
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