Invention Grant
US07560705B2 Workpiece handling scan arm for ion implantation system 有权
用于离子植入系统的工件处理扫描臂

Workpiece handling scan arm for ion implantation system
Abstract:
An ion implantation apparatus, system, and method are provided for connecting and disconnecting a workpiece holder from a scan arm. A twist head is provided, wherein an electrostatic chuck is operable to be mounted, wherein one or more rotating and non-rotating members associated with one or more of the twist head and electrostatic chuck have one or more dynamic electrical and fluid rotary connections associated therewith. The electrostatic chuck is further operable to be removed from the twist head without disconnecting the one or more dynamic fluid seals.
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