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    GAS BEARING ELECTROSTATIC CHUCK
    1.
    发明申请
    GAS BEARING ELECTROSTATIC CHUCK 有权
    气体轴承静电卡盘

    公开(公告)号：US20090273878A1

    公开(公告)日：2009-11-05

    申请号：US12113091

    申请日：2008-04-30

    申请人： William David Lee ,  Marvin Raymond LaFontaine ,  Ashwin Madhukar Purohit ,  Joseph Daniel Gillespie ,  Donovan Beckel ,  Teng Chao Tao ,  Alexander Henry Slocum ,  Samir Nayfeh

    发明人： William David Lee ,  Marvin Raymond LaFontaine ,  Ashwin Madhukar Purohit ,  Joseph Daniel Gillespie ,  Donovan Beckel ,  Teng Chao Tao ,  Alexander Henry Slocum ,  Samir Nayfeh

    IPC分类号： H02N13/00

    CPC分类号： H01L21/6831

    摘要： An electrostatic clamp is provided having a clamping plate, wherein the clamping plate has a central region and an annulus region. A plurality of gas supply orifices are defined in the central region of the clamping plate, wherein the plurality of gas supply orifices are in fluid communication with a pressurized gas supply, and wherein the pressurized gas supply is configured to provide a cushion of gas between the clamping surface and the workpiece in the central region of the clamping plate via the plurality of gas supply orifices. One or more gas return orifices defined in one or more of the central region and annulus region of the clamping plate, wherein the one or more gas return orifices are in fluid communication with a vacuum source, therein generally defining an exhaust path for the cushion of gas. A seal is disposed in the annulus region of the clamping plate, wherein the seal is configured to generally prevent a leakage of the cushion of gas from the central region to an environment external to the annulus region. One or more electrodes are further electrically connected to a first voltage potential to provide a first clamping force.

    摘要翻译： 提供具有夹板的静电夹具，其中夹持板具有中心区域和环形区域。 多个气体供给孔限定在夹紧板的中心区域中，其中多个气体供应孔与加压气体源流体连通，并且其中，加压气体供应构造成在气体供应孔之间提供气垫 通过多个气体供应孔在夹紧板的中心区域中夹持表面和工件。 限定在夹板的一个或多个中心区域和环形区域中的一个或多个气体返回孔，其中一个或多个气体返回孔与真空源流体连通，其中通常限定用于衬垫的衬垫的排气路径 加油站。 密封件设置在夹紧板的环空区域中，其中密封件构造成大体上防止气垫从中心区域泄漏到环形区域外部的环境。 一个或多个电极进一步电连接到第一电压电位以提供第一夹紧力。

    Gas bearing electrostatic chuck
    4.
    发明授权
    Gas bearing electrostatic chuck 有权
    气体轴承静电吸盘

    公开(公告)号：US09036326B2

    公开(公告)日：2015-05-19

    申请号：US12113091

    申请日：2008-04-30

    申请人： William David Lee ,  Marvin Raymond LaFontaine ,  Ashwin Madhukar Purohit ,  Joseph Daniel Gillespie ,  Donovan Beckel ,  Teng Chao Tao ,  Alexander Henry Slocum ,  Samir Nayfeh

    发明人： William David Lee ,  Marvin Raymond LaFontaine ,  Ashwin Madhukar Purohit ,  Joseph Daniel Gillespie ,  Donovan Beckel ,  Teng Chao Tao ,  Alexander Henry Slocum ,  Samir Nayfeh

    IPC分类号： H01L21/683

    CPC分类号： H01L21/6831

    摘要： An electrostatic clamp is provided having a clamping plate, wherein the clamping plate has a central region and an annulus region. A plurality of gas supply orifices are defined in the central region of the clamping plate, wherein the plurality of gas supply orifices are in fluid communication with a pressurized gas supply, and wherein the pressurized gas supply is configured to provide a cushion of gas between the clamping surface and the workpiece in the central region of the clamping plate via the plurality of gas supply orifices. One or more gas return orifices defined in one or more of the central region and annulus region of the clamping plate, wherein the one or more gas return orifices are in fluid communication with a vacuum source, therein generally defining an exhaust path for the cushion of gas. A seal is disposed in the annulus region of the clamping plate, wherein the seal is configured to generally prevent a leakage of the cushion of gas from the central region to an environment external to the annulus region. One or more electrodes are further electrically connected to a first voltage potential to provide a first clamping force.

    摘要翻译： 提供具有夹板的静电夹具，其中夹持板具有中心区域和环形区域。 多个气体供给孔限定在夹紧板的中心区域中，其中多个气体供应孔与加压气体源流体连通，并且其中加压气体供应构造成在气体供应孔之间提供气垫 通过多个气体供应孔在夹紧板的中心区域中夹持表面和工件。 限定在夹板的一个或多个中心区域和环形区域中的一个或多个气体返回孔，其中一个或多个气体返回孔与真空源流体连通，其中通常限定用于衬垫的衬垫的排气路径 加油站。 密封件设置在夹紧板的环空区域中，其中密封件构造成大体上防止气垫从中心区域泄漏到环形区域外部的环境。 一个或多个电极进一步电连接到第一电压电位以提供第一夹紧力。