公开(公告)号：US07560705B2

公开(公告)日：2009-07-14

申请号：US11840888

申请日：2007-08-17

申请人： Ari Eiriksson ,  Donovan Beckel ,  Robert Mitchell ,  Michel Pharand ,  Marvin LaFontaine ,  Ashwin Purohit ,  Steven Weed ,  Wayne Arseneault ,  Shantanu Pathak ,  Joseph Daniel Foley

发明人： Ari Eiriksson ,  Donovan Beckel ,  Robert Mitchell ,  Michel Pharand ,  Marvin LaFontaine ,  Ashwin Purohit ,  Steven Weed ,  Wayne Arseneault ,  Shantanu Pathak ,  Joseph Daniel Foley

IPC分类号： H01J37/317

CPC分类号： H01L21/6831 ,  H01L21/68764

摘要： An ion implantation apparatus, system, and method are provided for connecting and disconnecting a workpiece holder from a scan arm. A twist head is provided, wherein an electrostatic chuck is operable to be mounted, wherein one or more rotating and non-rotating members associated with one or more of the twist head and electrostatic chuck have one or more dynamic electrical and fluid rotary connections associated therewith. The electrostatic chuck is further operable to be removed from the twist head without disconnecting the one or more dynamic fluid seals.

摘要翻译： 提供离子注入装置，系统和方法用于将工件保持器与扫描臂连接和断开。 提供了一种扭转头，其中可操作地安装静电卡盘，其中与一个或多个扭转头和静电卡盘相关联的一个或多个旋转和非旋转构件具有与其相关联的一个或多个动态电动和流体旋转连接 。 静电卡盘还可操作以从扭转头移除而不断开一个或多个动态流体密封件。

公开(公告)号：US20080105836A1

公开(公告)日：2008-05-08

申请号：US11840888

申请日：2007-08-17

申请人： Ari Eiriksson ,  Donovan Beckel ,  Robert Mitchell ,  Michel Pharand ,  Marvin LaFontaine ,  Ashwin Purohit ,  Steven Weed ,  Wayne Arseneault ,  Shantanu Pathak ,  Joseph Foley

发明人： Ari Eiriksson ,  Donovan Beckel ,  Robert Mitchell ,  Michel Pharand ,  Marvin LaFontaine ,  Ashwin Purohit ,  Steven Weed ,  Wayne Arseneault ,  Shantanu Pathak ,  Joseph Foley

IPC分类号： H01J29/02

CPC分类号： H01L21/6831 ,  H01L21/68764

摘要： An ion implantation apparatus, system, and method are provided for connecting and disconnecting a workpiece holder from a scan arm. A twist head is provided, wherein an electrostatic chuck is operable to be mounted, wherein one or more rotating and non-rotating members associated with one or more of the twist head and electrostatic chuck have one or more dynamic electrical and fluid rotary connections associated therewith. The electrostatic chuck is further operable to be removed from the twist head without disconnecting the one or more dynamic fluid seals.

摘要翻译： 提供离子注入装置，系统和方法用于将工件保持器与扫描臂连接和断开。 提供了一种扭转头，其中可操作地安装静电卡盘，其中与一个或多个扭转头和静电卡盘相关联的一个或多个旋转和非旋转构件具有与其相关联的一个或多个动态电动和流体旋转连接 。 静电卡盘还可操作以从扭转头移除而不断开一个或多个动态流体密封件。

公开(公告)号：US20090273878A1

公开(公告)日：2009-11-05

申请号：US12113091

申请日：2008-04-30

申请人： William David Lee ,  Marvin Raymond LaFontaine ,  Ashwin Madhukar Purohit ,  Joseph Daniel Gillespie ,  Donovan Beckel ,  Teng Chao Tao ,  Alexander Henry Slocum ,  Samir Nayfeh

发明人： William David Lee ,  Marvin Raymond LaFontaine ,  Ashwin Madhukar Purohit ,  Joseph Daniel Gillespie ,  Donovan Beckel ,  Teng Chao Tao ,  Alexander Henry Slocum ,  Samir Nayfeh

IPC分类号： H02N13/00

CPC分类号： H01L21/6831

摘要： An electrostatic clamp is provided having a clamping plate, wherein the clamping plate has a central region and an annulus region. A plurality of gas supply orifices are defined in the central region of the clamping plate, wherein the plurality of gas supply orifices are in fluid communication with a pressurized gas supply, and wherein the pressurized gas supply is configured to provide a cushion of gas between the clamping surface and the workpiece in the central region of the clamping plate via the plurality of gas supply orifices. One or more gas return orifices defined in one or more of the central region and annulus region of the clamping plate, wherein the one or more gas return orifices are in fluid communication with a vacuum source, therein generally defining an exhaust path for the cushion of gas. A seal is disposed in the annulus region of the clamping plate, wherein the seal is configured to generally prevent a leakage of the cushion of gas from the central region to an environment external to the annulus region. One or more electrodes are further electrically connected to a first voltage potential to provide a first clamping force.

摘要翻译： 提供具有夹板的静电夹具，其中夹持板具有中心区域和环形区域。 多个气体供给孔限定在夹紧板的中心区域中，其中多个气体供应孔与加压气体源流体连通，并且其中，加压气体供应构造成在气体供应孔之间提供气垫 通过多个气体供应孔在夹紧板的中心区域中夹持表面和工件。 限定在夹板的一个或多个中心区域和环形区域中的一个或多个气体返回孔，其中一个或多个气体返回孔与真空源流体连通，其中通常限定用于衬垫的衬垫的排气路径 加油站。 密封件设置在夹紧板的环空区域中，其中密封件构造成大体上防止气垫从中心区域泄漏到环形区域外部的环境。 一个或多个电极进一步电连接到第一电压电位以提供第一夹紧力。

公开(公告)号：US20100181470A1

公开(公告)日：2010-07-22

申请号：US12357688

申请日：2009-01-22

申请人： Marvin Farley ,  Donald Polner ,  Geoffrey Ryding ,  Theodore Smick ,  Takao Sakase ,  Ronald Horner ,  Edward Eisner ,  Paul Eide ,  Brian Freer ,  Mark Lambert ,  Donovan Beckel

发明人： Marvin Farley ,  Donald Polner ,  Geoffrey Ryding ,  Theodore Smick ,  Takao Sakase ,  Ronald Horner ,  Edward Eisner ,  Paul Eide ,  Brian Freer ,  Mark Lambert ,  Donovan Beckel

IPC分类号： G01D18/00 ,  A61N5/00 ,  H01J5/18

CPC分类号： H01J37/244 ,  H01J37/3171 ,  H01J2237/024 ,  H01J2237/24507 ,  H01J2237/24528 ,  H01J2237/24535 ,  H01J2237/24542

摘要： An ion beam angle calibration and emittance measurement system, comprising a plate comprising an elongated slit therein, wherein the elongated slit positioned at a rotation center of the plate and configured to allow a first beam portion to pass therethrough. A beam current detector located downstream of the plate, wherein the beam current detector comprises a slit therein configured to permit a second beam portion of the first beam portion to pass therethrough, wherein the beam current detector is configured to measure a first beam current associated with the first beam portion. A beam angle detector is located downstream of the beam current detector and configured to detect a second beam current associated with the second beam portion. The plate, the current beam detector and the beam angle detector are configured to collectively rotate about the rotation center of the plate.

摘要翻译： 一种离子束角度校准和发射测量系统，包括其中包括细长狭缝的板，其中所述细长狭缝位于所述板的旋转中心并且被配置为允许第一梁部分通过。 一种位于板的下游的光束电流检测器，其中所述光束电流检测器包括其中的狭缝，其中构造成允许所述第一光束部分的第二光束部分穿过其中，其中所述光束电流检测器被配置为测量与 第一梁部分。 光束角检测器位于束电流检测器的下游，并被配置为检测与第二光束部分相关联的第二光束电流。 板，当前的束检测器和束角检测器构造成围绕板的旋转中心共同旋转。

公开(公告)号：US08168941B2

公开(公告)日：2012-05-01

申请号：US12357688

申请日：2009-01-22

申请人： Marvin Farley ,  Donald Polner ,  Geoffrey Ryding ,  Theodore Smick ,  Takao Sakase ,  Ronald Horner ,  Edward Eisner ,  Paul Eide ,  Brian Freer ,  Mark Lambert ,  Donovan Beckel

发明人： Marvin Farley ,  Donald Polner ,  Geoffrey Ryding ,  Theodore Smick ,  Takao Sakase ,  Ronald Horner ,  Edward Eisner ,  Paul Eide ,  Brian Freer ,  Mark Lambert ,  Donovan Beckel

IPC分类号： H01J3/00 ,  G01N27/62

CPC分类号： H01J37/244 ,  H01J37/3171 ,  H01J2237/024 ,  H01J2237/24507 ,  H01J2237/24528 ,  H01J2237/24535 ,  H01J2237/24542

摘要： An ion beam angle calibration and emittance measurement system, comprising a plate comprising an elongated slit therein, wherein the elongated slit positioned at a rotation center of the plate and configured to allow a first beam portion to pass therethrough. A beam current detector located downstream of the plate, wherein the beam current detector comprises a slit therein configured to permit a second beam portion of the first beam portion to pass therethrough, wherein the beam current detector is configured to measure a first beam current associated with the first beam portion. A beam angle detector is located downstream of the beam current detector and configured to detect a second beam current associated with the second beam portion. The plate, the current beam detector and the beam angle detector are configured to collectively rotate about the rotation center of the plate.

摘要翻译： 一种离子束角度校准和发射测量系统，包括其中包括细长狭缝的板，其中所述细长狭缝位于所述板的旋转中心并且被配置为允许第一梁部分通过。 一种位于板的下游的光束电流检测器，其中所述光束电流检测器包括其中的狭缝，其中构造成允许所述第一光束部分的第二光束部分穿过其中，其中所述光束电流检测器被配置为测量与 第一梁部分。 光束角检测器位于束电流检测器的下游，并被配置为检测与第二光束部分相关联的第二光束电流。 板，当前的束检测器和束角检测器构造成围绕板的旋转中心共同旋转。

公开(公告)号：US09036326B2

公开(公告)日：2015-05-19

申请号：US12113091

申请日：2008-04-30

申请人： William David Lee ,  Marvin Raymond LaFontaine ,  Ashwin Madhukar Purohit ,  Joseph Daniel Gillespie ,  Donovan Beckel ,  Teng Chao Tao ,  Alexander Henry Slocum ,  Samir Nayfeh

发明人： William David Lee ,  Marvin Raymond LaFontaine ,  Ashwin Madhukar Purohit ,  Joseph Daniel Gillespie ,  Donovan Beckel ,  Teng Chao Tao ,  Alexander Henry Slocum ,  Samir Nayfeh

IPC分类号： H01L21/683

CPC分类号： H01L21/6831

摘要： An electrostatic clamp is provided having a clamping plate, wherein the clamping plate has a central region and an annulus region. A plurality of gas supply orifices are defined in the central region of the clamping plate, wherein the plurality of gas supply orifices are in fluid communication with a pressurized gas supply, and wherein the pressurized gas supply is configured to provide a cushion of gas between the clamping surface and the workpiece in the central region of the clamping plate via the plurality of gas supply orifices. One or more gas return orifices defined in one or more of the central region and annulus region of the clamping plate, wherein the one or more gas return orifices are in fluid communication with a vacuum source, therein generally defining an exhaust path for the cushion of gas. A seal is disposed in the annulus region of the clamping plate, wherein the seal is configured to generally prevent a leakage of the cushion of gas from the central region to an environment external to the annulus region. One or more electrodes are further electrically connected to a first voltage potential to provide a first clamping force.

摘要翻译： 提供具有夹板的静电夹具，其中夹持板具有中心区域和环形区域。 多个气体供给孔限定在夹紧板的中心区域中，其中多个气体供应孔与加压气体源流体连通，并且其中加压气体供应构造成在气体供应孔之间提供气垫 通过多个气体供应孔在夹紧板的中心区域中夹持表面和工件。 限定在夹板的一个或多个中心区域和环形区域中的一个或多个气体返回孔，其中一个或多个气体返回孔与真空源流体连通，其中通常限定用于衬垫的衬垫的排气路径 加油站。 密封件设置在夹紧板的环空区域中，其中密封件构造成大体上防止气垫从中心区域泄漏到环形区域外部的环境。 一个或多个电极进一步电连接到第一电压电位以提供第一夹紧力。