公开(公告)号：US07560705B2

公开(公告)日：2009-07-14

申请号：US11840888

申请日：2007-08-17

Applicant: Ari Eiriksson ,  Donovan Beckel ,  Robert Mitchell ,  Michel Pharand ,  Marvin LaFontaine ,  Ashwin Purohit ,  Steven Weed ,  Wayne Arseneault ,  Shantanu Pathak ,  Joseph Daniel Foley

Inventor： Ari Eiriksson ,  Donovan Beckel ,  Robert Mitchell ,  Michel Pharand ,  Marvin LaFontaine ,  Ashwin Purohit ,  Steven Weed ,  Wayne Arseneault ,  Shantanu Pathak ,  Joseph Daniel Foley

IPC: H01J37/317

CPC classification number: H01L21/6831 ,  H01L21/68764

Abstract: An ion implantation apparatus, system, and method are provided for connecting and disconnecting a workpiece holder from a scan arm. A twist head is provided, wherein an electrostatic chuck is operable to be mounted, wherein one or more rotating and non-rotating members associated with one or more of the twist head and electrostatic chuck have one or more dynamic electrical and fluid rotary connections associated therewith. The electrostatic chuck is further operable to be removed from the twist head without disconnecting the one or more dynamic fluid seals.

Abstract translation: 提供离子注入装置，系统和方法用于将工件保持器与扫描臂连接和断开。 提供了一种扭转头，其中可操作地安装静电卡盘，其中与一个或多个扭转头和静电卡盘相关联的一个或多个旋转和非旋转构件具有与其相关联的一个或多个动态电动和流体旋转连接 。 静电卡盘还可操作以从扭转头移除而不断开一个或多个动态流体密封件。

公开(公告)号：US20080105836A1

公开(公告)日：2008-05-08

申请号：US11840888

申请日：2007-08-17

Applicant: Ari Eiriksson ,  Donovan Beckel ,  Robert Mitchell ,  Michel Pharand ,  Marvin LaFontaine ,  Ashwin Purohit ,  Steven Weed ,  Wayne Arseneault ,  Shantanu Pathak ,  Joseph Foley

Inventor： Ari Eiriksson ,  Donovan Beckel ,  Robert Mitchell ,  Michel Pharand ,  Marvin LaFontaine ,  Ashwin Purohit ,  Steven Weed ,  Wayne Arseneault ,  Shantanu Pathak ,  Joseph Foley

IPC: H01J29/02

CPC classification number: H01L21/6831 ,  H01L21/68764

Abstract: An ion implantation apparatus, system, and method are provided for connecting and disconnecting a workpiece holder from a scan arm. A twist head is provided, wherein an electrostatic chuck is operable to be mounted, wherein one or more rotating and non-rotating members associated with one or more of the twist head and electrostatic chuck have one or more dynamic electrical and fluid rotary connections associated therewith. The electrostatic chuck is further operable to be removed from the twist head without disconnecting the one or more dynamic fluid seals.

Abstract translation: 提供离子注入装置，系统和方法用于将工件保持器与扫描臂连接和断开。 提供了一种扭转头，其中可操作地安装静电卡盘，其中与一个或多个扭转头和静电卡盘相关联的一个或多个旋转和非旋转构件具有与其相关联的一个或多个动态电动和流体旋转连接 。 静电卡盘还可操作以从扭转头移除而不断开一个或多个动态流体密封件。