发明授权
- 专利标题： Optical system, method of manufacturing an optical system and method of manufacturing an optical element
- 专利标题（中）： 光学系统，制造光学系统的方法和制造光学元件的方法
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申请号： US12197035申请日： 2008-08-22
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公开(公告)号： US07605926B1公开(公告)日： 2009-10-20
- 发明人: Jochen Hetzler , Ralf Arnold , Frank Schillke , Bernd Doerband
- 申请人： Jochen Hetzler , Ralf Arnold , Frank Schillke , Bernd Doerband
- 申请人地址： DE Oberkochen
- 专利权人： Carl Zeiss SMT AG
- 当前专利权人： Carl Zeiss SMT AG
- 当前专利权人地址： DE Oberkochen
- 代理机构： Townsend and Townsend and Crew LLP
- 主分类号： G01B9/02
- IPC分类号： G01B9/02 ; G01B11/02
摘要：
A method of positioning optical elements relative to each other uses an interferometer apparatus comprising a plurality of holograms generating beams of adjustment measuring light which are incident on optical surfaces of the optical elements. Interference patterns generated by superimposing adjustment measuring light of the beams reflected from the surfaces are indicative of positioning errors of the optical elements. The beams of adjustment measuring light may comprise focused beams forming a point focus on the optical surface and beams of light which is orthogonally incident on extended portions on the optical surface.