Invention Grant
- Patent Title: Antireflective coating compositions
- Patent Title (中): 防反射涂料组合物
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Application No.: US11550459Application Date: 2006-10-18
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Publication No.: US07666575B2Publication Date: 2010-02-23
- Inventor: Woo-Kyu Kim , Hengpeng Wu , David Abdallah , Mark Neisser , PingHung Lu , Ruzhi Zhang , M. Dalil Rahman
- Applicant: Woo-Kyu Kim , Hengpeng Wu , David Abdallah , Mark Neisser , PingHung Lu , Ruzhi Zhang , M. Dalil Rahman
- Applicant Address: US NJ Somerville
- Assignee: AZ Electronic Materials USA Corp
- Current Assignee: AZ Electronic Materials USA Corp
- Current Assignee Address: US NJ Somerville
- Agent Sangya Jain
- Main IPC: G03F7/09
- IPC: G03F7/09 ; G03F7/11 ; G03F7/30
Abstract:
The present invention relates to an antireflective coating composition comprising, (i) a thermal acid generator; (ii) a crosslinkable polymer comprising at least one aromatic group; and, (iii) a polymeric crosslinker comprising at least one unit of structure (6), where R11 to R13 is independently selected from H, (C1-C6) alkyl and aromatic group, R14 and R15 are independently (C1-C10) alkyl. The invention also relates to a process for imaging the antireflective coating composition of the present invention.
Public/Granted literature
- US20080096125A1 Antireflective Coating Compositions Public/Granted day:2008-04-24
Information query
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