发明授权
US07667266B2 Semiconductor device including active pattern with channel recess, and method of fabricating the same 失效
包括具有通道凹槽的有源图案的半导体器件及其制造方法

Semiconductor device including active pattern with channel recess, and method of fabricating the same
摘要:
A semiconductor device including an active pattern having a channel recess portion, and a method of fabricating the same, are disclosed. In one embodiment, the semiconductor device includes an active pattern including first active regions and a second active region interposed between the first active regions. The active pattern protrudes above a surface of a semiconductor substrate and includes a channel recess portion above the second active region and between the first active regions. A device isolation layer surrounds the active pattern and has a groove exposing side walls of the recessed second active region. A distance between opposing side walls of the first active regions exposed by the channel recess portion is greater than a distance between side walls of the groove. A gate pattern is located in the channel recess portion and extends along the groove.
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