发明授权
US07667266B2 Semiconductor device including active pattern with channel recess, and method of fabricating the same
失效
包括具有通道凹槽的有源图案的半导体器件及其制造方法
- 专利标题: Semiconductor device including active pattern with channel recess, and method of fabricating the same
- 专利标题(中): 包括具有通道凹槽的有源图案的半导体器件及其制造方法
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申请号: US12116821申请日: 2008-05-07
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公开(公告)号: US07667266B2公开(公告)日: 2010-02-23
- 发明人: Kyoung-Ho Jung , Makoto Yoshida , Jae-Rok Kahng , Chul Lee , Keun-Nam Kim
- 申请人: Kyoung-Ho Jung , Makoto Yoshida , Jae-Rok Kahng , Chul Lee , Keun-Nam Kim
- 申请人地址: KR Suwon-si, Gyeonggi-do
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR Suwon-si, Gyeonggi-do
- 代理机构: Volentine & Whitt, PLLC
- 优先权: KR10-2007-0055682 20070607
- 主分类号: H01L29/76
- IPC分类号: H01L29/76 ; H01L29/94 ; H01L31/062 ; H01L31/113 ; H01L31/119 ; H01L29/00
摘要:
A semiconductor device including an active pattern having a channel recess portion, and a method of fabricating the same, are disclosed. In one embodiment, the semiconductor device includes an active pattern including first active regions and a second active region interposed between the first active regions. The active pattern protrudes above a surface of a semiconductor substrate and includes a channel recess portion above the second active region and between the first active regions. A device isolation layer surrounds the active pattern and has a groove exposing side walls of the recessed second active region. A distance between opposing side walls of the first active regions exposed by the channel recess portion is greater than a distance between side walls of the groove. A gate pattern is located in the channel recess portion and extends along the groove.
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