Invention Grant
US07746462B2 Inspection systems and methods for extending the detection range of an inspection system by forcing the photodetector into the non-linear range
有权
用于通过强制光电探测器进入非线性范围来扩展检查系统的检测范围的检查系统和方法
- Patent Title: Inspection systems and methods for extending the detection range of an inspection system by forcing the photodetector into the non-linear range
- Patent Title (中): 用于通过强制光电探测器进入非线性范围来扩展检查系统的检测范围的检查系统和方法
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Application No.: US11751293Application Date: 2007-05-21
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Publication No.: US07746462B2Publication Date: 2010-06-29
- Inventor: Zhongping Cai , Alexander Slobodov , Anatoly Romanovsky , Christian H. Wolters
- Applicant: Zhongping Cai , Alexander Slobodov , Anatoly Romanovsky , Christian H. Wolters
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Technologies Corporation
- Current Assignee: KLA-Tencor Technologies Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Daffer McDaniel, LLP
- Agent Kevin L. Daffer
- Main IPC: G01N21/00
- IPC: G01N21/00

Abstract:
An inspection system and method is provided herein for increasing the detection range of the inspection system. According to one embodiment, the inspection system may include a photodetector having a plurality of stages, which are adapted to convert light scattered from a specimen into an output signal, and a voltage divider network coupled for extending the detection range of the photodetector (and thus, the detection range of the inspection system) by saturating at least one of the stages. This forces the photodetector to operate in a non-linear manner. However, measurement inaccuracies are avoided by calibrating the photodetector output to remove any non-linear effects that may be created by intentionally saturating the at least one of the stages. In one example, a table of values may be generated during a calibration phase to convert the photodetector output into an actual amount of scattered light.
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