发明授权
- 专利标题： Method and device for the thermal treatment of substrates
- 专利标题（中）： 用于基材热处理的方法和装置
-
申请号： US11573012申请日： 2005-11-12
-
公开(公告)号： US07842905B2公开(公告)日： 2010-11-30
- 发明人: Werner Saule , Lothar Berger , Christian Krauss , Robert Weihing
- 申请人： Werner Saule , Lothar Berger , Christian Krauss , Robert Weihing
- 申请人地址： DE
- 专利权人： Steag Hamatech AG
- 当前专利权人： Steag Hamatech AG
- 当前专利权人地址： DE
- 代理机构： Robert Becker & Assoc.
- 代理商 Robert W. Becker
- 优先权： DE102004055449 20041117
- 国际申请： PCT/EP2005/012143 WO 20051112
- 国际公布： WO2006/053690 WO 20060526
- 主分类号： H05B3/68
- IPC分类号： H05B3/68 ; A21B2/00 ; C23C16/00
摘要：
This invention relates to a method and a device for the thermal treatment of substrates in which the substrates are held in contact with or a small distance away from a heating plate, which is heated by a plurality of separately controllable heating elements on the side of the heating plate facing away from the substrate, the heating plate being surrounded, at least in its plane, by a frame spaced apart therefrom, and gas being conveyed, in a controlled manner, through a gap between the frame and at least one edge of the heating plate.
公开/授权文献
信息查询
