发明授权
- 专利标题： Method and apparatus for MEMS oscillator
- 专利标题（中）： MEMS振荡器的方法和装置
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申请号： US11950373申请日： 2007-12-04
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公开(公告)号： US07863697B2公开(公告)日： 2011-01-04
- 发明人: Xiao Yang , Dongmin Chen , Ye Wang , Justin Payne , Yuxiang Wang , Wook Ji
- 申请人： Xiao Yang , Dongmin Chen , Ye Wang , Justin Payne , Yuxiang Wang , Wook Ji
- 申请人地址： US CA Santa Clara
- 专利权人： Miradia Inc.
- 当前专利权人： Miradia Inc.
- 当前专利权人地址： US CA Santa Clara
- 代理机构： Townsend and Townsend and Crew LLP
- 主分类号： H01L29/86
- IPC分类号： H01L29/86
摘要：
A resonator includes a CMOS substrate having a first electrode and a second electrode. The CMOS substrate is configured to provide one or more control signals to the first electrode. The resonator also includes a resonator structure including a silicon material layer. The resonator structure is coupled to the CMOS substrate and configured to resonate in response to the one or more control signals.
公开/授权文献
- US20080150647A1 METHOD AND APPARATUS FOR MEMS OSCILLATOR 公开/授权日：2008-06-26
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