发明授权
- 专利标题: Method of manufacturing nitride-based semiconductor light-emitting device
- 专利标题(中): 制造氮化物系半导体发光元件的方法
-
申请号: US11802482申请日: 2007-05-23
-
公开(公告)号: US07989244B2公开(公告)日: 2011-08-02
- 发明人: Kyoung-kook Kim , Kwang-ki Choi , June-o Song , Suk-ho Yoon , Kwang-hyeon Baik , Hyun-soo Kim
- 申请人: Kyoung-kook Kim , Kwang-ki Choi , June-o Song , Suk-ho Yoon , Kwang-hyeon Baik , Hyun-soo Kim
- 申请人地址: KR Gyunggi-do
- 专利权人: Samsung LED Co., Ltd.
- 当前专利权人: Samsung LED Co., Ltd.
- 当前专利权人地址: KR Gyunggi-do
- 代理机构: Harness, Dickey & Pierce, P.L.C.
- 优先权: KR10-2006-0076368 20060811
- 主分类号: H01L21/00
- IPC分类号: H01L21/00
摘要:
Provided is a method of manufacturing a nitride-based semiconductor light-emitting device having increased efficiency and increased output properties. The method may include forming a sacrificial layer having a wet etching property on a substrate, forming a protective layer on the sacrificial layer, protecting the sacrificial layer in a reaction gas atmosphere for crystal growth, and facilitating epitaxial growth of a semiconductor layer to be formed on the protective layer, forming a semiconductor device including an n-type semiconductor layer, an active layer, and a p-type semiconductor layer on the protective layer, and removing the substrate from the semiconductor device by wet etching the sacrificial layer.
公开/授权文献
信息查询
IPC分类: