发明授权
- 专利标题: Molybdenum tubular sputtering targets with uniform grain size and texture
- 专利标题(中): 具有均匀粒度和质地的钼管式溅射靶
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申请号: US11574469申请日: 2005-08-29
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公开(公告)号: US08088232B2公开(公告)日: 2012-01-03
- 发明人: Brad Lemon , Joseph Hirt , Timothy Welling , James G. Daily, III , David Meendering , Gary Rozak , Jerome O'Grady , Peter R. Jepson , Prabhat Kumar , Steven A. Miller , Richard Wu , Davd G. Schwarz
- 申请人: Brad Lemon , Joseph Hirt , Timothy Welling , James G. Daily, III , David Meendering , Gary Rozak , Jerome O'Grady , Peter R. Jepson , Prabhat Kumar , Steven A. Miller , Richard Wu , Davd G. Schwarz
- 申请人地址: US MA Newton
- 专利权人: H.C. Starck Inc.
- 当前专利权人: H.C. Starck Inc.
- 当前专利权人地址: US MA Newton
- 代理机构: Connolly Bove Lodge & Hutz LLP
- 国际申请: PCT/US2005/030852 WO 20050829
- 国际公布: WO2006/026621 WO 20060309
- 主分类号: C22C27/04
- IPC分类号: C22C27/04 ; C25B9/00 ; C23C14/00 ; B22F3/24 ; B32B9/00
摘要:
Molybdenum, sputtering targets and sintering characterized as having no or minimal texture banding or through thickness gradient. The molybdenum sputtering targets having a fine, uniform grain size as well as uniform texture, are high purity and can be micro-alloyed to improved performance. The sputtering targets can be round discs, square, rectangular or tubular and can be sputtered to form thin films on substrates. By using a segment-forming method, the size of the sputtering target can be up to 6 m×5.5 m. The thin films can be used in electronic components such as Thin Film Transistor-Liquid Crystal Displays, Plasma Display Panels, Organic Light Emitting Diodes, Inorganic Light Emitting Diode Displays, Field Emitting Displays, solar cells, sensors, semiconductor devices, and gate device for CMOS (complementary metal oxide semiconductor) with tunable work functions.
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